Abstract: Provided is a plant for the continuous production of monosilane and tetrachlorosilane by catalytic dismutation of trichlorosilane, wherein the plant contains: a countercurrent reactor having a double wall, a catalyst bed containing a catalyst which is located in the countercurrent reactor, a condenser at the top of the countercurrent reactor, a vaporizer unit at the bottom of the countercurrent reactor, a trichlorosilane feed line for the introduction of trichlorosilane into the countercurrent reactor, a heat exchanger, with the trichlorosilane conveyed by line via the heat exchanger and preheated there by a bottom product from the vaporizer unit and, for this purpose, the bottom product is fed by line via the heat exchanger into the double wall at a level in the lower part of the countercurrent reactor and discharged from the double wall at a level in the upper part of the countercurrent reactor, a condensation unit downstream of the condenser, and a distillation column having an outlet for monosilane.

Abstract: The present invention relates to a plant and a process for the continuous production of monosilane and tetrachlorosilane by catalytic dismutation of trichlorosilane at an operating temperature and a pressure of from 1 to 50 bar abs. in a plant according to claim 1, in which—trichlorosilane (A) is preheated in a heat exchanger (7), and fed to the 10 countercurrent reactor (1) which is provided with catalyst (3),—product mixture formed in the countercurrent reactor (1) is at least partly condensed by means of the condenser (5) at a temperature in the range from ?25 to 50° C. with the condensate flowing back into the countercurrent reactor (1),—the product phase which is not condensed in the condenser (5) is passed to the 15 condensation unit (8) which is operated at a temperature in the range from ?40 to ?110° C.,—the volatile product phase from the condensation unit (8) is fed to the distillation column (9) which is operated at a temperature in the range from ?60 to ?170° C.