Abstract: Single board multi-channel programmable detection sensor is disclosed. The sensor has a processor operatively connected to the emitter driver, and a photodetector for controlling one or more operational parameters of the sensor in response to a program. Sensor outputs the TTL signal when desired level of light attenuated or transmitted through the system of fiber optics sensors. The processor sets triggering levels of the signal detected by the sensor in analog fast comparator circuit to threshold based on the signal difference pre-set and actual values.

Abstract: The following provides a system and method for 2-D thermal imaging of phosphor coated surfaces. The system and method enable increased temperature measurement accuracy and speed of data analysis by implementing a control system that controls simultaneously an illumination system and an image capture device including a high speed camera. More particularly, the control system can control the illumination system and the camera to acquire images when emitted light intensity ranges are in a desired range to improve temperature measurement accuracy, and to increase the speed of data processing.

Abstract: The invention pertains to a low-profile, optical sensor to measure distance having a light emitter and a light sensor. More particularly, the optical sensor includes a focusing film having a series of blinds to filter diffused reflected light without the need for a focusing lens. The optical sensors can be used in a variety of applications, including using two sensors to measure thickness of an object or the use of 3 sensors to determine the angle between two surfaces. The invention further pertains to a calibration sensor and method of calibration using 3 or more optical sensors to level a showerhead and a chuck in a semi-conductor deposition apparatus.

Abstract: A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.

Abstract: A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.

Abstract: The invention provides an optical gas flow meter for measuring very low gas flow in a pipe. The meter comprises an optical system which transilluminates the pipe with plurality of parallel, collimated optical beams. The beams are deflected due to changes refractive index which is caused by a heater located in the pipe parallel to the beams. Deflected beams then pass through spatial filters and are detected by photodetectors. Stochastic signals from the photodetectors are further processed and gas velocity is calculated from cross-correlation function and known beam spacing. Multiple heaters allow the measurement of gas velocity at multiple points throughout the pipe.