Abstract: Methods, system, and apparatus for substrate processing are provided for flowing a gas into a substrate processing chamber housing a substrate clamped to a chuck, wherein the gas is introduced at a location above the substrate; and while the gas is introduced, dechucking the substrate.

Abstract: An apparatus and a method for displaying amount of money are disclosed. The apparatus for displaying amount of money comprises a signal detection module, a position module, a storage device, a micro controller and a monitor. The signal detection module detects a radio frequency identification (RFID) signal outputted from a toll gantry. The position module provides a position information. The storage device stores a gantry information. After the RFID signal was detected, the micro controller calculates an original debit amount according to the position information and the gantry information, and generates a money information according to the original debit amount. The monitor shows the money information.