Patents by Inventor Yury Dmitrievich Kalashnikov

Yury Dmitrievich Kalashnikov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical vapor deposition reactor having ceramic lining for production of polysilicon
    Patent number: 9145303
    Abstract: Apparatus configured to produce polysilicon by chemical vapor deposition, including a reactor vessel having an inner surface defining at least a portion of a chamber, the inner surface having a lining of quartz ceramic. The apparatus also includes a silicon substrate disposed within the chamber of the reactor vessel, the silicon substrate having a deposition surface upon which polysilicon is deposited. Methods of producing polysilicon using such apparatus, as well as methods for applying the quartz ceramic lining onto a reactor vessel, are also provided.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: September 29, 2015
    Assignee: ECOLIVE TECHNOLOGIES LTD.
    Inventors: Anatoly Alexandrovich Goncharov, Yury Dmitrievich Kalashnikov
  • CHEMICAL VAPOR DEPOSITION REACTOR HAVING CERAMIC LINING FOR PRODUCTION OF POLYSILICON
    Publication number: 20140235041
    Abstract: Apparatus configured to produce polysilicon by chemical vapor deposition, including a reactor vessel having an inner surface defining at least a portion of a chamber, the inner surface having a lining of quartz ceramic. The apparatus also includes a silicon substrate disposed within the chamber of the reactor vessel, the silicon substrate having a deposition surface upon which polysilicon is deposited. Methods of producing polysilicon using such apparatus, as well as methods for applying the quartz ceramic lining onto a reactor vessel, are also provided.
    Type: Application
    Filed: February 15, 2013
    Publication date: August 21, 2014
    Applicant: Ecolive Technologies LTD.
    Inventors: Anatoly Alexandrovich Goncharov, Yury Dmitrievich Kalashnikov