Patents by Inventor Yusang Cheon

Yusang Cheon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device manufacturing system, semiconductor device inspection device, and semiconductor device manufacturing method
    Patent number: 12051629
    Abstract: A semiconductor device manufacturing system includes a spin coater and a coating layer inspector. The spin coater includes: a chuck, a rotation driver configured to rotate the chuck; and a solution dispenser configured to spray a solution onto a portion of the coating layer formed on an edge portion of the wafer, wherein the coating layer inspector includes an edge inspection camera and an inspection controller configured to determine a radius, eccentricity, and a top-view shape of the coating layer, based on images of the edge portion of the wafer.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: July 30, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seunghwa Hyun, Younghwan Kim, Hwayoung Park, Youngsu Ryu, Yusang Cheon
  • SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM, SEMICONDUCTOR DEVICE INSPECTION DEVICE, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    Publication number: 20210066140
    Abstract: A semiconductor device manufacturing system includes a spin coater and a coating layer inspector. The spin coater includes: a chuck, a rotation driver configured to rotate the chuck; and a solution dispenser configured to spray a solution onto a portion of the coating layer formed on an edge portion of the wafer, wherein the coating layer inspector includes an edge inspection camera and an inspection controller configured to determine a radius, eccentricity, and a top-view shape of the coating layer, based on images of the edge portion of the wafer.
    Type: Application
    Filed: March 20, 2020
    Publication date: March 4, 2021
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seunghwa Hyun, Younghwan Kim, Hwayoung Park, Youngsu Ryu, Yusang Cheon