Patents by Inventor Yusei Miyazono

Yusei Miyazono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for developing resist
    Patent number: 5652938
    Abstract: A resist developing apparatus has a plurality of developing solution containers each provided with a temperature regulator, a mixture tank connected to the plurality of developing solution containers, a flow control valve connected between the mixture tank and each developing solution container, a temperature detector for detecting the temperature of developing solution in the mixture tank, and a control system for controlling the flow control valve in accordance with the temperature detected by the temperature detector. As the development progresses, the temperature of the developing solution is lowered to stop the development. Thereafter, the developing solution is supplanted by rinsing solution.
    Type: Grant
    Filed: June 21, 1996
    Date of Patent: July 29, 1997
    Assignee: Fujitsu Limited
    Inventors: Masahiro Uraguchi, Yusei Miyazono, Kazuhiko Sumi
  • Method and apparatus for developing resist
    Patent number: 5571644
    Abstract: A resist developing apparatus has a plurality of developing solution containers each provided with a temperature regulator, a mixture tank connected to the plurality of developing solution containers, a flow control valve connected between the mixture tank and each developing solution container, a temperature detector for detecting the temperature of developing solution in the mixture tank, and a control system for controlling the flow control valve in accordance with the temperature detected by the temperature detector. As the development progresses, the temperature of the developing solution is lowered to stop the development. Thereafter, the developing solution is supplanted by rinsing solution.
    Type: Grant
    Filed: July 3, 1995
    Date of Patent: November 5, 1996
    Assignee: Fujitsu Limited
    Inventors: Masahiro Uraguchi, Yusei Miyazono, Kazuhiko Sumi