Patents by Inventor Yusheng Fang

Yusheng Fang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • THROTTLE VALVE AND FORELINE CLEANING USING A MICROWAVE SOURCE
    Publication number: 20230390811
    Abstract: Exemplary semiconductor processing systems may include a processing chamber defining a processing region. The systems may include a foreline coupled with the processing chamber, the foreline defining a fluid conduit. The systems may include a radical generator having an inlet and an outlet. The outlet may be fluidly coupled with the foreline. The systems may include a gas source fluidly coupled with the inlet of the radical generator. The systems may include a throttle valve coupled with the foreline downstream of the radical generator.
    Type: Application
    Filed: June 6, 2022
    Publication date: December 7, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Khokan Chandra Paul, Truong Van Nguyen, Kelvin Chan, Diwakar Kedlaya, Anantha K. Subramani, Abdul Aziz Khaja, Vijet Patil, Yusheng Fang, Liangfa Hu, Prashant Kumar Kulshreshtha