Abstract: Semiconductor devices, such as memory devices, and associated systems and methods, are disclosed herein. A representative semiconductor device includes (i) a substrate having multiple conductive first contacts, (ii) a semiconductor die coupled to the substrate and having multiple conductive second contacts, and (iii) multiple wire bonds electrically coupling individual ones of the first contacts to corresponding ones of the second contacts. The first contacts, the second contacts, or both the first and second contacts can be arranged in a pair-staggered pattern. More specifically, the first contacts and/or the second contacts can extend sequentially along an axis of the semiconductor device, and adjacent pairs of the first contacts and/or adjacent pairs of the second contacts can be staggered relative to the axis.

Abstract: A nitride semiconductor device includes a substrate; a nitride semiconductor multilayer structure which is formed on the substrate, includes a first nitride semiconductor layer and a second nitride semiconductor layer having a different composition from that of the first nitride semiconductor layer, and generates two dimensional electron gas on a hetero interface between the first nitride semiconductor layer and the second nitride semiconductor layer; and an insulating film which covers at least a portion of a surface of the nitride semiconductor multilayer structure, has a concentration of Si—H bonds equal to or less than 6.0×1021 cm?3, and is formed of silicon nitride.

Abstract: A nitride semiconductor device includes a substrate; a nitride semiconductor multilayer structure which is formed on the substrate, includes a first nitride semiconductor layer and a second nitride semiconductor layer having a different composition from that of the first nitride semiconductor layer, and generates two dimensional electron gas on a hetero interface between the first nitride semiconductor layer and the second nitride semiconductor layer; and an insulating film which covers at least a portion of a surface of the nitride semiconductor multilayer structure, has a concentration of Si—H bonds equal to or less than 6.0×1021 cm?3, and is formed of silicon nitride.

Abstract: According to this GaN-based HFET, resistivity ? of a semi-insulating film forming a gate insulating film is 3.9×109?cm. The value of this resistivity ? is a value derived when the current density is 6.25×10?4 (A/cm2). By inclusion of the gate insulating film by a semi-insulating film having a resistivity ?=3.9×109?cm, a withstand voltage of 1000 V can be obtained. Meanwhile, the withstand voltage abruptly drops as the resistivity of the gate insulating film exceeds 1 ×1011?cm, and the gate leak current increases when the resistivity of the gate insulating film drops below 1 ×107?cm.

Abstract: A nitride semiconductor layered body includes a Si substrate having a surface, as the principal surface, inclined at an off-angle of 0 degrees or more and 4.0 degrees or less with respect to a plane and a nitride semiconductor layer disposed on the Si substrate.

Abstract: A semiconductor device includes an insulating substrate including a first surface and an opposing second surface, and a semiconductor chip. The semiconductor chip is mounted over the first surface, includes signal electrodes, power-supply electrodes and ground electrodes, which connect to pads on the first surface of the insulating substrate. Lands provided on the second surface of the insulating substrate include signal lands, power-supply lands and ground lands through vias penetrate from the first surface to the second surface of the insulating substrate, and include signal vias electrically connected the signal connection pads to the signal lands, power-supply vias electrically connected the power-supply connection pads to the power-supply lands and ground vias electrically connected the ground connection pads to the ground lands. At least one of the signal vias are closer to the connection pads than immediately adjacent one of the power-supply vias or the ground vias.

Abstract: According to this GaN-based HFET, resistivity ? of a semi-insulating film forming a gate insulating film is 3.9×109 ?cm. The value of this resistivity ? is a value derived when the current density is 6.25×10?4 (A/cm2). By inclusion of the gate insulating film by a semi-insulating film having a resistivity ?=3.9×109 ?cm, a withstand voltage of 1000 V can be obtained. Meanwhile, the withstand voltage abruptly drops as the resistivity of the gate insulating film exceeds 1×1011 ?cm, and the gate leak current increases when the resistivity of the gate insulating film drops below 1×107 ?cm.

Abstract: A semiconductor device may include, but is not limited to: a wiring hoard; and first and second chips stacked over the wiring board. The wiring board includes a plurality of first data terminals and a plurality of second data terminals. One of the first and second chips is sandwiched between the wiring board and the other of the first and second chips. The first chip includes a plurality of first data pads. The second chip includes a plurality of second data pads and a plurality of third data pads. The first data terminals of the wiring board are electrically connected respectively to the first data pads of the first chip and further respectively to the second data pads of the second chip. The second data terminals are electrically connected respectively to the third data pads of the second chip and electrically disconnected from the first chip.

Abstract: A semiconductor device includes an insulating substrate including a first surface and an opposing second surface, and a semiconductor chip. The semiconductor chip is mounted over the first surface, includes signal electrodes, power-supply electrodes and ground electrodes, which connect to pads on the first surface of the insulating substrate. Lands provided on the second surface of the insulating substrate include signal lands, power-supply lands and ground lands through vias penetrate from the first surface to the second surface of the insulating substrate, and include signal vias electrically connected the signal connection pads to the signal lands, power-supply vias electrically connected the power-supply connection pads to the power-supply lands and ground vias electrically connected the ground connection pads to the ground lands. At least one of the signal vias are closer to the connection pads than immediately adjacent one of the power-supply vias or the ground vias.

Abstract: A semiconductor device includes an insulating substrate including a first surface and an opposing second surface, and a semiconductor chip. The semiconductor chip is mounted over the first surface, includes signal electrodes, power-supply electrodes and ground electrodes, which connect to pads on the first surface of the insulating substrate. Lands provided on the second surface of the insulating substrate include signal lands, power-supply lands and ground lands through vias penetrate from the first surface to the second surface of the insulating substrate, and include signal vias electrically connected the signal connection pads to the signal lands, power-supply vias electrically connected the power-supply connection pads to the power-supply lands and ground vias electrically connected the ground connection pads to the ground lands. At least one of the signal vias are closer to the connection pads than immediately adjacent one of the power-supply vias or the ground vias.

Abstract: A variable resistance element that can stably perform a switching operation with a property variation being reduced by suppressing a sharp current that accompanies completion of forming process, and a non-volatile semiconductor memory device including the variable resistance element are realized. The non-volatile semiconductor memory device uses the variable resistance element for storing information in which a resistance changing layer is interposed between a first electrode and a second electrode, and a buffer layer is inserted between the first electrode and the resistance changing layer where a switching interface is formed. The buffer layer and the resistance changing layer include n-type metal oxides, and materials of the buffer layer and the resistance changing layer are selected such that energy at a bottom of a conduction band of the n-type metal oxide configuring the buffer layer is lower than that of the n-type metal oxide configuring the resistance changing layer.

Abstract: A first opening and a second opening are formed at the same time over a first metal wiring and a second metal wiring, respectively which are provided as the same layer on a substrate on which a transistor for selecting a memory cell is formed. Then, a variable resistor and an upper electrode are deposited on a whole surface so as to completely fill the first opening with the upper electrode but not to completely fill the second opening with it. Thereafter, a variable resistive element is formed in the first opening and a via hole to connect to the third metal wiring (bit line), in the second opening, at the same time, by performing back-etching until a surface of the second metal wiring is exposed at a bottom of the second opening.

Abstract: The present invention provides a variable resistive element that can perform a stable switching operation at low voltage and low current, and also provides a low-power consumption large-capacity non-volatile semiconductor memory device including the variable resistive element. The non-volatile semiconductor memory device is a device using a variable resistive element, which includes a variable resistor between a first electrode and a second electrode, for storing information, wherein an oxygen concentration of a hafnium oxide (HfOx) film or a zirconium oxide (ZrOx) film constituting the variable resistor is optimized such that a stoichiometric composition ratio x of oxygen to Hf or Zr falls within a range of 1.7?x?1.97.

Abstract: A semiconductor device may include, but is not limited to: a wiring hoard; and first and second chips stacked over the wiring board. The wiring board includes a plurality of first data terminals and a plurality of second data terminals. One of the first and second chips is sandwiched between the wiring board and the other of the first and second chips. The first chip includes a plurality of first data pads. The second chip includes a plurality of second data pads and a plurality of third data pads. The first data terminals of the wiring board are electrically connected respectively to the first data pads of the first chip and further respectively to the second data pads of the second chip. The second data terminals are electrically connected respectively to the third data pads of the second chip and electrically disconnected from the first chip.

Abstract: A variable resistance element that can stably perform a switching operation with a property variation being reduced by suppressing a sharp current that accompanies completion of forming process, and a non-volatile semiconductor memory device including the variable resistance element are realized. The non-volatile semiconductor memory device uses the variable resistance element for storing information in which a resistance changing layer is interposed between a first electrode and a second electrode, and a buffer layer is inserted between the first electrode and the resistance changing layer where a switching interface is formed. The buffer layer and the resistance changing layer include n-type metal oxides, and materials of the buffer layer and the resistance changing layer are selected such that energy at a bottom of a conduction band of the n-type metal oxide configuring the buffer layer is lower than that of the n-type metal oxide configuring the resistance changing layer.

Abstract: A first opening and a second opening are formed at the same time over a first metal wiring and a second metal wiring, respectively which are provided as the same layer on a substrate on which a transistor for selecting a memory cell is formed. Then, a variable resistor and an upper electrode are deposited on a whole surface so as to completely fill the first opening with the upper electrode but not to completely fill the second opening with it. Thereafter, a variable resistive element is formed in the first opening and a via hole to connect to the third metal wiring (bit line), in the second opening, at the same time, by performing back-etching until a surface of the second metal wiring is exposed at a bottom of the second opening.

Abstract: A manufacturing method for a variable resistive element according to which a stable switching operation can be achieved with excellent reproducibility is provided. A conductive thin film is deposited on a semiconductor substrate and patterned to a predetermined form, and after that, a first interlayer insulating film is deposited. An opening is then created in a predetermined location on the first interlayer insulating film in such a manner that the upper surface of the conductive thin film is exposed and the thickness of the conductive thin film formed at the bottom of this opening is reduced through processing, and after that, an oxidation process is carried out on the periphery of the exposed conductive thin film. As a result, a variable resistor film is formed in the peripheral region of the opening, and this variable resistor film divides the conductive thin film into a first electrode and a second electrode.

Abstract: It is an object of the present invention to provide a method for forming an interlayer insulation film suppressing the occurrence of voids in the interlayer insulation film. A method for forming an interlayer insulation film of the present invention, comprising the steps of: (1) forming an etching stopper film of a silicon nitride film on an entire surface including a step part on a semiconductor substrate having the step part with an aspect ratio of ?3; (2) forming an interlayer insulation film of an impurity-doped silicate film on the silicon nitride film; and (3) performing reflow of the interlayer insulation film by a heat treatment, wherein the formation of the silicon nitride film is controlled such that the N—H bond density of the silicon nitride film is 1.0×1022 pieces/cm3 or less.

Abstract: A trench isolation method for semiconductor devices, the method includes the steps of: successively depositing a pad oxide film and a nitride film on a semiconductor substrate and then selectively removing the pad oxide film and the nitride film to form a mask pattern; forming trench regions in the semiconductor substrate using the formed mask pattern; depositing a thermal oxide film on side walls and bottoms of the formed trench regions by thermal oxidation; depositing on the semiconductor substrate having the trench regions a first buried oxide film having such a thickness that the trench regions are not completely filled by thermal CVD using SiH4/N2O gas; depositing a plasma oxide film as a second buried oxide film, by HDP plasma CVD, such that the trench regions are filled with the film; and removing upper portions of the first and second buried oxide films by CMP (chemical mechanical polishing) using the nitride film as a stopper and then etching away the nitride film and the pad oxide film, wherein the

Abstract: It is an object of the present invention to provide a method for forming an interlayer insulation film suppressing the occurrence of voids in the interlayer insulation film. A method for forming an interlayer insulation film of the present invention, comprising the steps of: (1) forming an etching stopper film of a silicon nitride film on an entire surface including a step part on a semiconductor substrate having the step part with an aspect ratio of ?3; (2) forming an interlayer insulation film of an impurity-doped silicate film on the silicon nitride film; and (3) performing reflow of the interlayer insulation film by a heat treatment, wherein the formation of the silicon nitride film is controlled such that the N—H bond density of the silicon nitride film is 1.0×1022 pieces/cm3 or less.