Patents by Inventor Yusra Fatima

Yusra Fatima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems having heated valve manifold assemblies, methods of manufacture of same
    Patent number: 12565942
    Abstract: A system for semiconductor fabrication having at least one heated valve manifold assembly comprising a heat-conductive plate having a total surface area, said conductive plate having a first side and a second side; at least one heater contacting said at least one heat-conductive plate; a valve manifold comprising a plurality of valves and pipes; said plurality of said valves and pipes having a total surface area wherein a portion of the surface area of said plurality of valves and pipes contacts said at least one heat-conductive plate; and one or more layers of insulation covering: (i) a majority of the surface area of said plurality of said valves and pipes where said portion contacts said at least one heat-conductive plate, (ii) said at least one heater in contact with said at least one heat-conductive plate, and (iii) the majority of the surface area of said at least one heat-conductive plate.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: March 3, 2026
    Assignee: Versum Materials US, LLC
    Inventors: Christopher David Fontana, David Carl Eshelman, Yusra Fatima, Thomas William Piltz, Mason Seidel