Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and an absorption film that absorbs the EUV light, in this order. The protection film contains 50 at % or more of Rh. When a band-shaped gray scale image parallel to an interface between the protection film and the multilayer reflective film is obtained by imaging a cross section of the protection film with a transmission electron microscope (TEM) and a luminance profile of the gray scale image in a longitudinal direction of the gray scale image is created, a number of peaks of the luminance profile per 100 nm in the longitudinal direction of the gray scale image is 50 or more.

Abstract: A displacement detection apparatus for a linear motion mechanism includes a nut member, a rod including elongate grooves elongating in an axial direction of the rod and a through hole, a permanent magnet disposed parallel to the rod, a magnet block made of synthetic resin and including a retaining portion holding the permanent magnet, a pair of leg portions extending from ends of the retaining portion that are spaced apart, and a nut made of metal insert-molded at an intermediate position between the pair of leg portions, and a displacement sensor disposed opposing to the permanent magnet. The pair of leg portions and the nut of the magnet block are disposed in the elongate groove of the rod and the magnet block is fixed to the rod by a bolt screwed to the nut, the bolt penetrating through the through hole extending through the rod.

Abstract: A displacement detection apparatus for a linear motion mechanism includes a nut member, a rod including elongate grooves elongating in an axial direction of the rod and a through hole, a permanent magnet disposed parallel to the rod, a magnet block made of synthetic resin and including a retaining portion holding the permanent magnet, a pair of leg portions extending from ends of the retaining portion that are spaced apart, and a nut made of metal insert-molded at an intermediate position between the pair of leg portions, and a displacement sensor disposed opposing to the permanent magnet. The pair of leg portions and the nut of the magnet block are disposed in the elongate groove of the rod and the magnet block is fixed to the rod by a bolt screwed to the nut, the bolt penetrating through the through hole extending through the rod.