Abstract: Disclosed is a substrate processing apparatus including: a holding unit configured to hold a substrate; a processing liquid supply unit configured to supply a first processing liquid and a second processing liquid to the substrate; a first cup configured to recover the first processing liquid; a second cup disposed adjacent to the first cup and configured to recover the second processing liquid; a recovery portion defined by a peripheral wall portion that is erected on a bottom portion of the first cup; and a cleaning liquid supply unit configured to supply a cleaning liquid to the recovery portion. The peripheral wall portion is cleaned by causing the cleaning liquid supplied by the cleaning liquid supply unit to overflow from the peripheral wall portion to the second cup side.

Abstract: A working vehicle includes: an engine mounted on a traveling machine body; a hydraulic continuously variable transmission configured to shift driving force from the engine; a transmission case incorporating the hydraulic continuously variable transmission; and rear traveling units disposed on both left and right sides of the transmission case via rear axle cases. The transmission case is divided into three sections of a front case, an intermediate case, and a rear case. The left and right rear axle cases are attached to both left and right sides of the rear case. The intermediate case, coupling the front case to the rear case, is coupled to left and right vehicle body frames forming the traveling machine body.

Abstract: This invention provides a method for forming an oxide layer on a metal substrate, which enables manufacture of an oxide layer with improved crystal orientation in comparison with that of the outermost layer of a metal substrate. The method for forming an oxide layer on a metal substrate 20 via RF magnetron sputtering comprises a step of subjecting the crystal-oriented metal substrate 20 exhibiting a c-axis orientation of 99% on its outermost layer to RF magnetron sputtering while adjusting the angle ? formed by a perpendicular at a film formation position 20a on the metal substrate 20 and a line from the film formation position 20a to a point 10a at which the perpendicular magnetic flux density is zero on the target 10 located at the position nearest to the film formation position 20a to 15 degrees or less.

Abstract: Disclosed is a liquid processing apparatus capable of performing a liquid processing and a drying processing in a position each having a different height. The liquid processing apparatus includes: a substrate holding unit configured to hold a substrate; a rotation driving unit configured to rotate the substrate holding unit; a substrate holding unit elevating member configured to lift and lower the substrate holding unit; a processing liquid supply unit configured to supply a processing liquid to the substrate; a liquid receiving cup configured to surround the substrate when the processing liquid is being supplied to the substrate; a drying cup located above the substrate and the liquid receiving cup when the processing liquid is being supplied to the substrate. The drying cup surrounds the substrate and located above the liquid receiving cup when the substrate is being dried.

Abstract: A liquid processing apparatus of the present disclosure includes a rotatable substrate holder that holds a wafer from above, and a top plate nozzle that supplies at least rinse liquid to the wafer and is provided in the rotation center of the substrate holder. The top plate nozzle is movably configured with the substrate holder in the top-bottom direction, and the rinse liquid is supplied to the wafer from the top plate nozzle while the top plate nozzle is spaced from the substrate holder. When the top plate nozzle approaches to the substrate holder, the rinse liquid is supplied to the lower surface of the substrate holder from the top plate nozzle to clean the lower surface of the substrate holder.

Abstract: A substrate processing apparatus includes: a storage tank configured to store a liquid; a substrate support unit configured to rotatably, horizontally support a substrate; and a plate driving unit configured to move the substrate support unit between an immersion position at which the substrate is immersed into the liquid stored in the storage tank, and a separation position located above the immersion position, at which the substrate is separated from the liquid stored in the storage tank. The substrate processing apparatus also includes a rotary drive unit configured to rotate the substrate supported by the substrate support unit, and liquid supply units configured to supply a liquid to the substrate that is being rotated by the rotary drive unit in the separation position.

Abstract: The driving device includes an applied voltage control unit configured to perform a transfer process of controlling a charge-coupled device to transfer electric charges. The applied voltage control unit is configured to switch, in order from a first end to a second end of a line of transfer electrodes of the charge-coupled device, a voltage applied to the transfer electrode from a control voltage for forming a potential well to a reference voltage for eliminating the potential well. The applied voltage control unit includes a control circuit configured to generate a driving signal based on a clock signal, and a driving circuit configured to apply the control voltage and the reference voltage selectively to the transfer electrode in accordance with the driving signal.

Abstract: The spatial information detection device emits, to a space including an intended area, signal light defined as light modulated with a modulation signal defined as a square wave signal having high and low level periods appearing alternately, each of the periods having its length randomly selected from integral multiples of a unit time period. The device generates signal electric charges by accumulating electric charges generated in response to light from the space in a collection time period determined by a demodulation signal defined as a signal having the same waveform as that of the modulation signal or that of the inverted modulation signal. The device corrects, using correction information regarding an effect caused by light from an unintended area, the amount of signal electric charges as an amount of intended electric charges produced in response to light from the intended area, thereby generating spatial information.

Abstract: Provided is a substrate processing apparatus in which flexibility of disposing a device configured to determine a holding state of a substrate and the flexibility of timing of determining the holding state are enhanced. The substrate processing apparatus includes a light projector configured to radiate detection light toward a region where a substrate may exist when the substrate is held by a substrate holding member and a light receiver configured to receive the detection light radiated from the light projector. A light path of the detection light from the light projector toward the light receiver passes a substrate surrounding member installed around the substrate held by the substrate holding member. The detection light penetrates the substrate surrounding member and has a wavelength which does not penetrate the substrate.

Abstract: A substrate processing apparatus includes: a storage tank configured to store a liquid; a substrate support unit 10 configured to rotatably, horizontally support a substrate W; and a plate driving unit 30a configured to move the substrate support unit 10 between an immersion position at which the substrate W is immersed into the liquid stored in the storage tank, and a separation position located above the immersion position, at which the substrate W is separated from the liquid stored in the storage tank. The substrate processing apparatus also includes a rotary drive unit 30M configured to rotate the substrate W supported by the substrate support unit 10, and liquid supply units 10n, 20m and 20n configured to supply a liquid to the substrate W that is being rotated by the rotary drive unit in the separation position.

Abstract: The distance measuring device includes a light source (1), a light-receiving sensor (2), a timing controller (5), a distance calculator (6), and a delay controller (8). The timing controller (5) outputs a modulation signal and plural reference timing signals. The modulation signal is a square wave signal having high and low level periods appearing alternately. Each of the high and low level periods has its length randomly selected from integral multiples of a predetermined unit time period. The reference timing signals include a signal having the same waveform as that of the modulation signal and a signal having the same waveform as that of the inverted modulation signal. The light source (1) varies an intensity of the light in concordance with the modulation signal. The delay controller (8) delays the plural reference timing signals by the delay period (Td) to create plural timing signals respectively.

Abstract: Provided is a substrate processing apparatus in which flexibility of disposing a device configured to determine a holding state of a substrate and the flexibility of timing of determining the holding state are enhanced. The substrate processing apparatus includes a light projector configured to radiate detection light toward a region where a substrate may exist when the substrate is held by a substrate holding member and a light receiver configured to receive the detection light radiated from the light projector. A light path of the detection light from the light projector toward the light receiver passes a substrate surrounding member installed around the substrate held by the substrate holding member. The detection light penetrates the substrate surrounding member and has a wavelength which does not penetrate the substrate.

Abstract: The spatial information detection device emits, to a space including an intended area, signal light defined as light modulated with a modulation signal defined as a square wave signal having high and low level periods appearing alternately, each of the periods having its length randomly selected from integral multiples of a unit time period. The device generates signal electric charges by accumulating electric charges generated in response to light from the space in a collection time period determined by a demodulation signal defined as a signal having the same waveform as that of the modulation signal or that of the inverted modulation signal. The device corrects, using correction information regarding an effect caused by light from an unintended area, the amount of signal electric charges as an amount of intended electric charges produced in response to light from the intended area, thereby generating spatial information.

Abstract: The present invention provides a method for laminating a decorative metal film on a resin base material with excellent adhesion to the resin base material and with a sufficient gloss imparted to the decorative metal film, and a resin base material having a decorative metal film. The method laminates a polymeric planarizing film on the resin base material using a vapor deposition polymerization method, and then laminates the decorative metal film on the planarizing film.

Abstract: A photodetector capable of improving dynamic range for input signals is provided. This photodetector includes a photoelectric converting portion, a charge separating portion, a charge accumulating portion, a barrier electrode formed the charge separating portion and the charge accumulating portion, and a barrier-height adjusting portion electrically connected to the barrier electrode. Undesired electric charges such as generated when environment light is incident on the photoelectric converting portion are removed by the charge separating portion. A potential barrier with an appropriate height is formed under the barrier electrode by applying a voltage to the barrier electrode according to an electric charge amount supplied from the charge separating portion to the barrier-height adjusting portion. Electric charges flowing from the charge separating portion into the charge accumulating portion over the potential barrier are provided as an output of the photodetector.

Abstract: The driving device includes an applied voltage control unit configured to perform a transfer process of controlling a charge-coupled device to transfer electric charges. The applied voltage control unit is configured to switch, in order from a first end to a second end of a line of transfer electrodes of the charge-coupled device, a voltage applied to the transfer electrode from a control voltage for forming a potential well to a reference voltage for eliminating the potential well. The applied voltage control unit includes a control circuit configured to generate a driving signal based on a clock signal, and a driving circuit configured to apply the control voltage and the reference voltage selectively to the transfer electrode in accordance with the driving signal.

Abstract: A compact image pickup device with high sensitivity is provided, which is suitable for a spatial information detecting apparatus. The image pickup device has a plurality of image pickup units arranged on a semiconductor substrate. Each of the image pickup units has a light receiving array of photoelectric conversion elements for generating electric charges corresponding to a received-light amount, a transfer array of charge transfer elements, an accumulation array of charge accumulation elements each having a greater charge storage capacity than a saturation charge amount of the photoelectric conversion element, and a charge-amount adjusting portion configured to determine an amount of undesired electric charges to be separated from the electric charges generated by each of the photoelectric conversion elements. The transfer array and the light receiving array are arranged in a line in a vertical direction. The accumulation array is disposed adjacent to the transfer array in a horizontal direction.

Abstract: An object of the present invention is to provide a mounting structure of infrared camera which enables effective transfer of heat generated in an image sensor to a lens unit without increasing the size of the infrared camera. In order to achieve the object, a mounting structure of infrared camera comprising a lens-side mount disposed in a lens unit in which an imaging lenses are disposed; and a camera main body-side mount disposed in a camera main body and geared with the lens-side mount in an attachable and detachable manner, wherein the geared portion between the lens-side mount and the camera main body-side mount has a contact area effective for heat transfer of 36% or more of the total surface area is adopted.

Abstract: Provided is a deposition apparatus that has a metal evaporation source for depositing a reflective layer, a pigment evaporation source for depositing a coloring layer, and a plasma polymerization source (electrode) for depositing a protective layer disposed inside a single vacuum processing room. By carrying out a step of depositing the reflective layer, a step of depositing the coloring layer, and a step of depositing the protective layer in the common vacuum processing room, processes can be simplified and an operation time can be reduced.

Abstract: The distance measuring device includes a light source (1), a light-receiving sensor (2), a timing controller (5), a distance calculator (6), and a delay controller (8). The timing controller (5) outputs a modulation signal and plural reference timing signals. The modulation signal is a square wave signal having high and low level periods appearing alternately. Each of the high and low level periods has its length randomly selected from integral multiples of a predetermined unit time period. The reference timing signals include a signal having the same waveform as that of the modulation signal and a signal having the same waveform as that of the inverted modulation signal. The light source (1) varies an intensity of the light in concordance with the modulation signal. The delay controller (8) delays the plural reference timing signals by the delay period (Td) to create plural timing signals respectively.