Abstract: An etching method is provided. The method includes: placing a substrate having SiGe or Ge on a surface thereof in a chamber; supplying an etching gas for etching SiGe or Ge to the substrate maintained at a first temperature at which no etching reaction occurs and adsorbing the etching gas onto the surface of the substrate; and changing the temperature of the substrate to a second temperature at which reaction between the SiGe or Ge and the etching gas occurs and etching the SiGe or Ge.

Abstract: To improve accuracy of a result acquired by analyzing, by using a machine learning model, an image in which a road is captured, an information processing system 100 is an information processing system for collecting a machine learning image, and includes a generation unit 122 and a storage processing unit 123. The generation unit 122 processes an image in which a road is captured, and generates capturing situation information indicating a situation related to capturing of the image. The storage processing unit 123 performs processing for storing an image, based on the capturing situation information.

Abstract: An etching method includes: exhausting a processing container in which a substrate is accommodated, the substrate including a first film, a porous film and a second film, each of the first film and the porous film being exposed from a surface of the substrate and the second film being not exposed from the surface of the substrate by being coated with the porous film; supplying, by a gas source, an etching gas having an etching property with respect to the first film and the second film to a gas supply path; storing the etching gas in a reservoir provided in the gas supply path to increase an internal pressure of the reservoir; and selectively etching the first film among the first film and the second film by opening a valve provided downstream of the reservoir to supply the etching gas stored in the reservoir into the processing container.

Abstract: A notch filter 100 includes a varistor 1 that is connected between a signal line SL and a ground G. The varistor 1 has a capacitive component and outputs a signal with a second frequency different from a signal with a first frequency flowing in the signal line SL and a signal with the second frequency superimposed on the signal line SL to the ground G.

Abstract: A rotary compressor 100 includes a drive shaft 101 having an eccentric shaft 101a, a piston 102 fitted onto the eccentric shaft 101a, a cylinder 103 that receives the eccentrically rotating piston 102, an upper end plate 104 and a lower end plate 105 that close the upper and lower opening surfaces of the cylinder 103, a vane 106 that divides a space formed by the cylinder 103, the piston 102, the upper end plate 104, and the lower end plate 105 into a suction chamber 113 and a compression chamber 114, a discharge space 117 that is formed by causing the cover 108 to close a recessed portion 107 obtained by recessing a surface of either the upper end plate 104 or the lower end plate 105 on the opposite side to the cylinder 103 and where discharge gas flows in from the compression chamber 114 and directly flows out to the outside of the compressor 100, and spatial volume of the discharge space 117 having 10 times enclosed volume of the cylinder 103, thereby reducing noise and vibration due to discharge pulsation

Abstract: An etching method of etching a silicon germanium film formed on a substrate, includes: supplying a first etching gas, which is a first fluorine-containing gas, to the substrate for a first duration; and after the supplying the first etching gas, supplying a second etching gas, which is a second fluorine-containing gas different from the first etching gas, to the substrate for a second duration shorter than the first duration.

Abstract: A rotary compressor 100 includes a drive shaft 101 having an eccentric shaft 101a, a piston 102 fitted onto the eccentric shaft 101a, a cylinder 103 that receives the eccentrically rotating piston 102, an upper end plate 104 and a lower end plate 105 that close the upper and lower opening surfaces of the cylinder 103, a vane 106 that divides a space formed by the cylinder 103, the piston 102, the upper end plate 104, and the lower end plate 105 into a suction chamber 113 and a compression chamber 114, a discharge space 117 that is formed by causing the cover 108 to close a recessed portion 107 obtained by recessing a surface of either the upper end plate 104 or the lower end plate 105 on the opposite side to the cylinder 103 and where discharge gas flows in from the compression chamber 114 and directly flows out to the outside of the compressor 100, and spatial volume of the discharge space 117 having 10 times enclosed volume of the cylinder 103, thereby reducing noise and vibration due to discharge pulsation

Abstract: A work machine includes: a controller; a first electrical circuit provided with a first power supply that supplies power to the controller; an electric drive source necessary for operating the work machine; and a second electrical circuit provided with a second power supply that supplies power to the electric drive source. The work machine further includes: a capacitor provided to the second electrical circuit; a first precharge device that performs precharge of the capacitor by using power of the first power supply; and a second precharge device that performs precharge of the capacitor by using power of the second power supply. The controller performs precharge by using one of the precharge devices when it is determined that precharge by using the other one of the precharge devices is impossible.

Abstract: A hydraulic excavator 1 includes an engine 16, a main hydraulic pump 17 driven by the engine 16, a plurality of hydraulic actuators driven with pressure oil discharged from the main hydraulic pump 17, a plurality of flow rate control valves adapted to control the flow rate of pressure oil to be supplied from the main hydraulic pump 17 to the respective hydraulic actuators, a pilot hydraulic pump 18 adapted to supply pressure oil for driving the flow rate control valves, and a controller 15 configured to control the discharge flow rate of the pilot hydraulic pump 18. The controller 15 controls the discharge flow rate of the pilot hydraulic pump 18 such that it becomes equal to the sum of requested pilot flow rates determined in accordance with control commands for the respective flow rate control valves and a preset standby flow rate.

Abstract: The present invention provides an exhaust purification filter with which pressure loss can be reduced, the filter having high exhaust purification performance and granular-substance-filtering performance. The exhaust purification filter comprises a filter base material having a wall flow structure, and an exhaust purification catalyst supported on a dividing wall of the filter base material, the exhaust purification filter being such that: a median pore diameter (D50) of the filter base material according to a volumetric basis is 15 ?m or greater; and the exhaust purification catalyst is unevenly supported on a high-density layer, in which the density of the exhaust purification catalyst is relatively high, and a low-density layer, in which the density of the exhaust purification catalyst is relatively low.

Abstract: A photodetection device includes: a base that defines first and second reference directions perpendicular to each other; a projection holder positioned in the first and second reference directions with respect to the base; a projection unit having a projector held by the base and a projection lens system held by the projection holder on a projection optical axis perpendicular to the first and second reference directions; a first projection shim replaceably interposed between the base and the projection holder, in a first projection gap that extends along the first reference direction; a second projection shim replaceably interposed between the base and the projection holder, in a second projection gap that extends along a projection intersecting direction that intersects the first and second reference directions; and a light projection screw that fixes the projection holder to the base by screwing along the first reference direction.

Abstract: A transient voltage protection device includes: an element body; a cavity portion provided in the element body; a pair of internal electrodes disposed in the element body; and a pair of external electrodes connected to the pair of internal electrodes. The pair of internal electrodes extend along a first direction and face each other in a second direction intersecting the first direction. The cavity portion includes a gap region located between the pair of internal electrodes in the second direction. A tip portion of at least one of the pair of internal electrodes is in contact with only the element body.

Abstract: Provided is an exhaust purification filter that is able to reduce pressure loss and that has high exhaust purification performance and particulate matter trapping performance. This exhaust purification filter comprises a filter substrate having a wall flow structure, and an exhaust purification catalyst supported on a partition wall of the filter substrate. The volume-based median pore diameter (D50) of the filter substrate is 18 ?m or greater, the full width at half maximum of the pore distribution of the filter substrate is 7 ?m to 15 ?m, and the exhaust purification catalyst is supported in an unevenly distributed manner in a high-density layer in which the density of the exhaust purification catalyst is relatively high and a low-density layer in which the density of the exhaust purification catalyst is relatively low.

Abstract: A transient voltage protection device includes: an element body; a cavity portion provided in the element body; a pair of internal electrodes disposed in the element body; and a pair of external electrodes connected to the pair of internal electrodes. The pair of internal electrodes extend along a first direction and face each other in a second direction intersecting the first direction. The cavity portion includes a gap region located between the pair of internal electrodes in the second direction. A tip portion of at least one of the pair of internal electrodes is in contact with only the element body.

Abstract: To improve efficiency of road surveillance, a road surveillance system includes a detection unit 122 and a processing unit 134. The detection unit 122 detects a road state being a state of an object on a road by processing an image in which the road is captured. The processing unit 134 performs, when the road state satisfies a first criterion, any of notification processing of making a notification of the road state that satisfies the first criterion according to notification setting related to the notification, and change-related processing related to a change in the notification setting, based on whether a second criterion is satisfied. The second criterion is a criterion related to a determination result of whether the road state satisfies the first criterion.

Abstract: A road surveillance system includes a video acquisition unit, a target determination unit, and a display control unit. The video acquisition unit acquires a video that captures a road. The target determination unit determines, based on a result of comparison between at least one frame image constituting the video and a reference image, and a first criterion, whether the at least one frame image is an analysis target. The display control unit causes a display unit to display information based on a result of the determination. The display control unit includes a first control unit and a second control unit. The first control unit causes the display unit to display an analysis result of at least one frame image being determined to be an analysis target. The second control unit causes the display unit to display detection information indicating that a frame image not being an analysis target is detected.

Abstract: To improve accuracy of a result acquired by analyzing, by using a machine learning model, an image in which a road is captured, an information processing system 100 is an information processing system for collecting a machine learning image, and includes a generation unit 122 and a storage processing unit 123. The generation unit 122 processes an image in which a road is captured, and generates capturing situation information indicating a situation related to capturing of the image. The storage processing unit 123 performs processing for storing an image, based on the capturing situation information.

Abstract: A notch filter 100 includes a varistor 1 that is connected between a signal line SL and a ground G. The varistor 1 has a capacitive component and outputs a signal with a second frequency different from a signal with a first frequency flowing in the signal line SL and a signal with the second frequency superimposed on the signal line SL to the ground G.

Abstract: A chip varistor includes an element body exhibiting varistor characteristics, internal electrodes containing a first electrically conductive material, and an intermediate conductor containing a second electrically conductive material. The intermediate conductor is separated from the internal electrodes in a direction in which the internal electrodes oppose each other, and is disposed between the internal electrodes. At least a part of the intermediate conductor overlaps the internal electrodes in the direction in which the internal electrodes oppose each other. The element body includes a low resistance region in which the second electrically conductive material is diffused. The low resistance region is located between the first and second internal electrodes in the direction in which the first and second internal electrodes oppose each other.

Abstract: Composite resin granules 5 contain a binder resin 2 and a thermally conductive filler. The thermally conductive filler includes a non-anisotropic thermally conductive filler 3 and an anisotropic thermally conductive filler 4. The composite resin granules containing the binder resin and the thermally conductive filler are formed into a spherical shape. The particles of the anisotropic thermally conductive filler 4 are oriented in random directions. A thermally conductive rein molded body 6 of the present invention is obtained by compressing the composite resin granules 5. Thus, the present invention provides the thermally conductive resin molded body that has relatively high thermal conductivities in the in-plane direction and the thickness direction, well-balanced directional properties of thermal conduction, and a low specific gravity, the composite resin granules suitable for the thermally conductive resin molded body, and methods for producing them.