Abstract: A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.

Abstract: A power transmitting apparatus included in the contactless power feeding apparatus includes a power supply circuit that supplies AC power having a predetermined drive frequency to a transmission coil for supplying power to a power receiving apparatus, a first coil and a first capacitor that are connected between the power supply circuit and the transmission coil, a second capacitor that is connected at first end to the first capacitor and is connected at a second end to the second end of the transmission coil, and a control circuit. Also, the power receiving apparatus includes a receiver coil for receiving power, and a resonant circuit that includes a resonance capacitor that resonates together with the receiver coil. Also, the control circuit of the power transmitting apparatus controls the power supply circuit such that the predetermined drive frequency falls within a predetermined frequency range including a resonance frequency of the resonant circuit.

Abstract: In a mounting structure, a micro vibrator has: a curved surface portion having a hemispherical curved surface; a connecting portion extending from the curved surface portion toward a center of a hemispherical shape of the curved surface portion; and a surface electrode covering at least a part of the connecting portion and at least a part of the curved surface portion. A mounting substrate has two or more wirings and a part of the micro vibrator is connected to the mounting substrate. The wirings each have an electrode connection portion connected to a portion of the surface electrode covering the connecting portion at an end. The two or more wirings include a voltage application wiring and a voltage detection wiring. The voltage application wiring is spaced away from the voltage detection wiring on the mounting substrate.

Abstract: A micro vibration body includes a curved surface portion, which has an annular curved surface, and a recessed portion, which is recessed from the curved surface portion. A mounting substrate includes an inner frame portion and electrode portions, which surround an inner frame portion. A joining member is provided in an inner region of the mounting substrate surrounded by the inner frame portion. The recessed portion of the micro vibration body has a bottom surface defining a mounted surface located in the inner region and joined to the mounting substrate via the joining member. The curved surface portion has a rim that includes an end portion of the curved surface portion on an opposite side to the recessed portion. The rim has a rim lower surface located on a same plane as the mounted surface or a tip end portion of the mounted surface.

Abstract: An inertial sensor includes a resonator, a mounting board, and an actuator. The resonator has a first drive mode and a second drive mode. The mounting board has a plurality of electrode portions arranged at a distance from each other and surrounding the resonator. The actuator is configured to vibrate in a z-axis direction. The z-axis direction is a direction orthogonal to a planar direction of the mounting board. The actuator is further configured to vibrate the resonator in the z-axis direction to cause a resonance mode.

Abstract: A power transmitting apparatus included in a contactless power feeding apparatus includes a power supply circuit that supplies AC power having a predetermined drive frequency to a transmission coil for supplying power to a power receiving apparatus, a power receiving circuit that receives returning power transmitted from the power receiving apparatus, a control circuit that controls, according to a voltage of the returning power, the power supply circuit such that an output voltage of the power receiving apparatus is in a predetermined allowable range. Also, the power receiving apparatus includes a resonant circuit for receiving power via the transmission coil of the power transmitting apparatus, a rectifier circuit that rectifies power received via the resonant circuit, and a power transmitting circuit that transmits the returning power according to a voltage of power output from the rectifier circuit to the power transmitting apparatus.

Abstract: A power transmission device of the non-contact feeding device includes the transmission coil that supplies power to a power receiving device, a power supply circuit that supplies AC power obtained by boosting or stepping down the input voltage to the transmission coil, a voltage detection circuit that measures the voltage input to the power supply circuit, and a control circuit that controls a degree of boosting or step-down with respect to the input voltage by the power supply circuit according to the input voltage measured. The power receiving device includes a resonance circuit including a receiving coil that receives the power from the power transmission device and a resonance capacitor that resonates with the receiving coil according to the power from the power transmission device and a rectifier circuit that rectifies the power output from the resonance circuit.

Abstract: A winding of a transmission coil included in a power transmission device of a contactless power feed apparatus and serving to transmit AC power to a power reception device contactlessly is formed of a wiring pattern provided on a substrate. The transmission coil is divided into partial coils arranged coaxially. Each of the partial coils is formed such that, among the partial coils, a number of turns of a winding included in a partial coil is larger as the partial coil is located more outwardly.

Abstract: A winding of a transmission coil included in a power transmission device of a contactless power feed apparatus and serving to transmit AC power to a power reception device contactlessly is formed of a wiring pattern provided on a substrate. The transmission coil is divided into partial coils arranged coaxially. Each of the partial coils is formed such that, among the partial coils, a number of turns of a winding included in a partial coil is larger as the partial coil is located more outwardly.

Abstract: A power transmission device includes power transmission coils, at least one power supply circuit, a communicator, and a control circuit. The power transmission coils transmit power to a power reception device via a power reception coil. The at least one power supply circuit supplies AC power to the power transmission coils, respectively. The communicator receives a signal indicating a power reception status of the power reception device from the power reception device. According to the power reception status, the control circuit selects a power transmission coil with a highest efficiency of power transmission to the power reception device among the power transmission coils to serve as the power transmission coil for power transmission to the power reception device, and controls the at least one power supply circuit so that AC power is supplied to the selected power transmission coil and is not supplied to an unselected power transmission coil.

Abstract: A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.

Abstract: A micro vibration body includes a curved surface portion, a recessed portion recessed from the curved surface portion, a bottom surface protruding portion protruding from a bottom surface of the recessed portion, and a through hole in the bottom surface protruding portion. A mounting substrate has a positioning recess, into which the bottom surface protruding portion is inserted, and electrode portions surrounding the inner frame portion. A joining member is in the positioning recess and joins the bottom surface protruding portion with the mounting substrate. The bottom surface is in contact with a region of the mounting substrate around the positioning recess. The bottom surface protruding portion has a tip end surface that is at a distance from the positioning recess. The joining member at least partially enters the through hole and is electrically connected to the conductive layer.

Abstract: An inertial sensor includes a lower substrate and an upper substrate. The upper substrate includes a micro oscillator, electrodes and a pad, which are independent of each other. The micro oscillator includes a curved surface portion, a joint portion recessed inward from an apex of the curved surface portion and joined to a support portion of the lower substrate, a rim at an end of the curved surface portion and a conductive film covering the micro oscillator. The curved surface portion is in an aerial state. The rim is made of the same material as the electrodes, located on a virtual flat plane formed by the electrodes, and apart from and surrounded by the electrodes. A portion of the conductive film that covers the joint portion is electrically bonded to a lower metal film covering the support portion.

Abstract: A micro-electro-mechanical systems (MEMS) sensor includes a substrate, a diaphragm portion and a piezoelectric film. The diaphragm portion is located at the substrate. The piezoelectric film is located on the diaphragm portion. The piezoelectric film is made of scandium aluminum nitride. A carbon concentration of the piezoelectric film is 2.5 atomic percent or less while an oxygen concentration of the piezoelectric film is 0.35 atomic percent or less.

Abstract: A power transmitting apparatus included in a contactless power feeding apparatus includes a power supply circuit that supplies AC power having a predetermined drive frequency to a transmission coil for supplying power to a power receiving apparatus, a power receiving circuit that receives returning power transmitted from the power receiving apparatus, a control circuit that controls, according to a voltage of the returning power, the power supply circuit such that an output voltage of the power receiving apparatus is in a predetermined allowable range. Also, the power receiving apparatus includes a resonant circuit for receiving power via the transmission coil of the power transmitting apparatus, a rectifier circuit that rectifies power received via the resonant circuit, and a power transmitting circuit that transmits the returning power according to a voltage of power output from the rectifier circuit to the power transmitting apparatus.

Abstract: A power transmitting apparatus included in the contactless power feeding apparatus includes a power supply circuit that supplies AC power having a predetermined drive frequency to a transmission coil for supplying power to a power receiving apparatus, a first coil and a first capacitor that are connected between the power supply circuit and the transmission coil, a second capacitor that is connected at first end to the first capacitor and is connected at a second end to the second end of the transmission coil, and a control circuit. Also, the power receiving apparatus includes a receiver coil for receiving power, and a resonant circuit that includes a resonance capacitor that resonates together with the receiver coil. Also, the control circuit of the power transmitting apparatus controls the power supply circuit such that the predetermined drive frequency falls within a predetermined frequency range including a resonance frequency of the resonant circuit.

Abstract: A power transmission device includes a transmission coil that supplies power to a power reception device, a power supply circuit that converts DC power supplied from a DC power source via a plurality of switching elements connected in a full bridge shape or a half bridge shape between DC power sources and the transmission coil into AC power and supplies the AC power to the transmission coil, a phase adjustment circuit having an LC series circuit connected in parallel with the transmission coil and a switching element connected in series with the LC series circuit, and a control circuit that controls switching on and off of the switching element of the phase adjustment circuit in accordance with a measured value of an amount of current when any of the plurality of switching elements of the power supply circuit is turned off by a current detection circuit.

Abstract: A power transmitter device of a non-contact power feeding device includes a transmitter coil configured to supply power to the power receiver device, a power supply circuit including a plurality of switching elements connected between a DC power supply and the transmitter coil in a full-bridge configuration or a half-bridge configuration. The power supply circuit may be configured to switch the plurality of switching elements to an on or off state at a switching frequency to convert DC power supplied from the DC power supply into AC power having the switching frequency and supply the AC power to the transmitter coil, and a phase control circuit including at least one LC series circuit connected to both ends of the transmitter coil.

Abstract: In a method for manufacturing a micro vibration body having a three-dimensional curved surface, a mold defining a recess part is prepared, and a plate-shaped reflow material is arranged on the mold so as to cover the recess part. Pressure of a space defined by the recess part covered with the reflow material is reduced, and the reflow material is deformed by heating from an upper surface side opposite to a lower surface facing the recess part and by means of the pressure reduced. When the reflow material is deformed, a part of the mold is heated and / or cooled. As another example, when the reflow material is deformed, a mold having a different heat capacity portion is used to generate a temperature gradient in the mold.

Abstract: A micro vibration body includes a curved surface portion, a recessed portion recessed from the curved surface portion, a bottom surface protruding portion protruding from a bottom surface of the recessed portion, and a through hole in the bottom surface protruding portion. A mounting substrate has a positioning recess, into which the bottom surface protruding portion is inserted, and electrode portions surrounding the inner frame portion. A joining member is in the positioning recess and joins the bottom surface protruding portion with the mounting substrate. The bottom surface is in contact with a region of the mounting substrate around the positioning recess. The bottom surface protruding portion has a tip end surface that is at a distance from the positioning recess. The joining member at least partially enters the through hole and is electrically connected to the conductive layer.