Patents by Inventor Yusuke MOCHIDA

Yusuke MOCHIDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240308023
    Abstract: A cover assembly includes a cover cleaning part covering at least a portion of an outer peripheral surface of a rotating body. The cover cleaning part includes: an outer cover part, constituting an outer surface of the cover cleaning part; an inner cover part, constituting at least a portion of an inner surface of the cover cleaning part; a fluid chamber, formed between the outer cover part and the inner cover part; and a cleaning liquid supply port, provided in the outer cover part or the inner cover part, communicating with the fluid chamber, and for supplying a cleaning liquid to the fluid chamber. The inner cover part includes at least one cleaning liquid discharge port communicating with the fluid chamber and facing the outer peripheral surface of the rotating body.
    Type: Application
    Filed: February 26, 2024
    Publication date: September 19, 2024
    Applicant: EBARA CORPORATION
    Inventor: YUSUKE MOCHIDA
  • Publication number: 20240286246
    Abstract: A technique is disclosed that can allow an elastic membrane to be inflated into a desired shape when a workpiece is released from a polishing head, or when the workpiece is held on the polishing head, thereby avoiding excessive stress on the workpiece. The method includes supplying a gas into a first pressure chamber and a second pressure chamber at a first flow rate and a second flow rate regulated by a first flow-rate control valve and a second flow-rate control valve to inflate an elastic membrane of a polishing head when a polished workpiece is released from the polishing head, or when a workpiece to be polished is held on the polishing head. The first pressure chamber and the second pressure chamber are formed by the elastic membrane.
    Type: Application
    Filed: February 14, 2024
    Publication date: August 29, 2024
    Inventors: Masayuki TAMURA, Yusuke MOCHIDA, Tetsuya TERADA, Noriyuki SATO, Kuniaki YAMAGUCHI
  • Publication number: 20230001539
    Abstract: A liquid feeder includes: a first arm having a first nozzle; a second arm having a second nozzle; a first rotation shaft supporting a proximal end part of the first arm; a second rotation shaft supporting a proximal end part of the second arm; a first rotation driver configured to rotate the first rotation shaft to turn the first arm from a fluid feed position to a retracted position; a second rotation driver configured to rotate the second rotation shaft to turn the second arm from a fluid feed position to a retracted position; and a controller. The first rotation shaft and the second rotation shaft are disposed coaxially with each other. The controller is capable of controlling the operation of the first rotation driver and the operation of the second rotation driver independently of each other.
    Type: Application
    Filed: June 27, 2022
    Publication date: January 5, 2023
    Inventors: Kuniaki YAMAGUCHI, Masayuki TAMURA, Kenji SHINKAI, Soichi ISOBE, Yusuke MOCHIDA