Abstract: There is provided a chamber structure which greatly facilitates maintenance, such as installation and removal of a transfer robot. In this chamber structure, a transfer robot is attached, via a robot base member, to an opening provided in a base portion of a transfer compartment of a transfer chamber. A robot base member is provided below the opening, and the transfer robot includes a base unit and an arm unit provided on an upper part of the base unit. A robot flange member with the same shape as an opening hole in the robot base member is provided above the base unit. The arm unit is freely insertable through the opening hole, and the robot flange member is detachably connected to a peripheral portion of the opening hole.

Abstract: There is provided a chamber structure which greatly facilitates maintenance, such as installation and removal of a transfer robot. In this chamber structure, a transfer robot is attached, via a robot base member, to an opening provided in a base portion of a transfer compartment of a transfer chamber. A robot base member is provided below the opening, and the transfer robot includes a base unit and an arm unit provided on an upper part of the base unit. A robot flange member with the same shape as an opening hole in the robot base member is provided above the base unit. The arm unit is freely insertable through the opening hole, and the robot flange member is detachably connected to a peripheral portion of the opening hole.