Patents by Inventor Yusuke TAKEMATSU

Yusuke TAKEMATSU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20230307258
    Abstract: A substrate processing apparatus includes a first tank, a path including a first path, a first heater, a hydrogen peroxide supply path, and a controller. The first path allows sulfuric acid to be supplied therethrough from the first tank to a nozzle. The first heater heats a heating region of the first path. The controller controls ejecting sulfuric acid heated by the first heater and a hydrogen peroxide solution from the nozzle onto a substrate, the sulfuric acid and the hydrogen peroxide solution on the substrate having been mixed, and then ejecting sulfuric acid having a temperature lower than a temperature of the sulfuric acid heated by the first heater and the hydrogen peroxide solution from the nozzle onto the substrate, the sulfuric acid and the hydrogen peroxide solution on the substrate having been mixed.
    Type: Application
    Filed: March 20, 2023
    Publication date: September 28, 2023
    Inventors: Katsuei HIGASHI, Toru ENDO, Yusuke TAKEMATSU, Keisuke TAKAGI, Naohiko YOSHIHARA
  • Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method
    Patent number: 11094564
    Abstract: A processing liquid supplying apparatus supplies a processing liquid to a processing unit which processes a substrate.
    Type: Grant
    Filed: October 24, 2018
    Date of Patent: August 17, 2021
    Inventors: Shota Iwahata, Ayumi Higuchi, Eri Fujita, Yoshiyuki Fujitani, Masako Mano, Yusuke Takematsu, Yosuke Okuya
  • PROCESSING LIQUID SUPPLYING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND PROCESSING LIQUID SUPPLYING METHOD
    Publication number: 20190131144
    Abstract: A processing liquid supplying apparatus supplies a processing liquid to a processing unit which processes a substrate.
    Type: Application
    Filed: October 24, 2018
    Publication date: May 2, 2019
    Inventors: Shota IWAHATA, Ayumi HIGUCHI, Eri FUJITA, Yoshiyuki FUJITANI, Masako MANO, Yusuke TAKEMATSU, Yosuke OKUYA