Patents by Inventor Yusuke Tamakawa

Yusuke Tamakawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230245916
    Abstract: An etching control method includes (a) collecting shape data including height information of a ring assembly measured at a plurality of locations on a surface of the ring assembly, the ring assembly being disposed to surround an area on a stage on which a substrate is placed; (b) specifying a control amount from the shape data collected in (a) by using a relationship model representing a relationship between pre-collected shape data that has been collected in advance and a control amount capable of controlling a sheath distribution near the ring assembly by which a tilting angle of a recess formed in the substrate by plasma etching is within an allowable range; and (c) applying the control amount specified in (b) thereby controlling the sheath distribution near the ring assembly.
    Type: Application
    Filed: January 23, 2023
    Publication date: August 3, 2023
    Applicant: Tokyo Electron Limited
    Inventor: Yusuke TAMAKAWA
  • Publication number: 20100323222
    Abstract: A magnetic recording medium includes: a nonmagnetic support having both principal planes, a nonmagnetic layer formed on one principal plane of the nonmagnetic support and containing a nonmagnetic powder, a conductive particle and a binder, and a magnetic layer formed on the nonmagnetic layer and containing a magnetic powder, a conductive particle and a binder, wherein each of the nonmagnetic layer and the magnetic layer is prepared in a wet on dry mode, and a conduction point particle size of the conductive particle contained in the magnetic layer falls within the range of 3 times or more and not more than 5 times an average thickness of the magnetic layer.
    Type: Application
    Filed: June 15, 2010
    Publication date: December 23, 2010
    Applicant: Sony Corporation
    Inventors: Eiji Nakashio, Futoshi Sasaki, Katsunori Maeshima, Yusuke Tamakawa, Kuniko Yamamoto, Minoru Yamaga