Abstract: A plasma processing system includes: first and second processing chambers having respective first and second substrate supports; a transport chamber connected to the first and second processing chambers, and having a transport device; and a controller that executes processing of (a) disposing a substrate including a silicon-containing film having a recess portion and a mask on the silicon-containing film on the first substrate support of the first processing chamber, (b) forming a carbon-containing film on a side wall of the silicon-containing film defining the recess portion in the first processing chamber, (c) transporting the substrate from the first processing chamber to the second processing chamber via the transport chamber and disposing the substrate on the second substrate support, and (d) etching a bottom portion of the recess portion where the carbon-containing film is formed by using a plasma formed from a first processing gas in the second processing chamber.

Abstract: A sanitary mask sheet, in which a WC value indicating a work volume up to a maximum pressure in a thickness direction is 0.3 Pa·m or more, and a capture rate of particles having a particle diameter of more than 1 ?m is 85% or more.

Abstract: An angle adjustment device capable of being kept at a desired angle is provided. The angle adjustment device can fix and keep the relative positions of the first base component and the second base component, and a support with a combination of the angle adjustment device and components such as a flat plate can keep the entire body in a shape opened on a plane, a folded shape, a shape kept at a desired angle, or the like. In addition, the angle adjustment device can make a bending movement in one direction, which prevents bending in a reverse direction. Therefore, it is possible to prevent an accidental bending movement of an apparatus including the angle adjustment device to prevent breakage or the like of the apparatus.

Abstract: A turbine rotor in an embodiment is configured by joining a rotor component member and a rotor component member together by bolt fastening with an abutting end surface of the rotor component member and an abutting end surface of the rotor component member abutting on each other. The turbine rotor includes: a cylindrical recessed portion that is formed at the abutting end surface and is recessed in an axial direction; an axial passage bored from a bottom surface of the cylindrical recessed portion in the axial direction; an introduction passage introducing the cooling medium into the axial passage; a discharge passage discharging the cooling medium from the axial passage; and a sealing member that is arranged in the cylindrical recessed portion and seals one end of the axial passage.

Abstract: The power consumption of a control device or a data processing system is reduced. Safety is enhanced. An electronic device is operated in a simple way. A control device includes an arithmetic circuit, an input unit, and a power management unit. The input unit includes a sensor element. The power management unit has a function of controlling supply and shutdown of power to the arithmetic circuit. The power management unit has a function of supplying power to the arithmetic circuit in response to a detection signal output from the sensor element. The sensor element includes one or more selected from an acceleration sensor, an angular velocity sensor, and a magnetic sensor. The arithmetic circuit includes a register. The register includes a first circuit and a second circuit.

Abstract: In a vehicle power-supply system, a backup power-supply device includes a low-voltage DC/DC converter, a backup battery, and switching mechanisms. A bidirectional switch unit is provided between a high-voltage DC/DC converter and a connecting point on a connecting wire and passes or interrupts a current flowing between the high-voltage DC/DC converter and the connecting point. A bidirectional switch unit is provided between the connecting point and a connecting point on a connecting wire and passes or interrupts a current flowing between the connecting point and the connecting point. A unidirectional switch unit is provided between the connecting point and the low-voltage DC/DC converter on the connecting wire and passes or interrupts a current flowing from the connecting point to the low-voltage DC/DC converter.

Abstract: An adhesive composition containing an acrylic resin (A) containing a terminal carboxyl-containing monomer (a1) unit represented by the following general formula (1), a (meth)acrylic acid monomer (a2) unit and a hydroxyl-containing monomer (a3) unit; an epoxy crosslinking agent (b1), and an isocyanate crosslinking agent (b2). In general formula (1): R1 represents hydrogen or a methyl group, R2 represents a saturated divalent aliphatic group, an unsaturated divalent aliphatic group, a divalent aromatic group, a saturated divalent alicyclic group, or an unsaturated divalent alicyclic hydrocarbon group, and n is a positive number of not less than 1.

Abstract: A turbine rotor in an embodiment is configured by joining a rotor component member and a rotor component member together by bolt fastening with an abutting end surface of the rotor component member and an abutting end surface of the rotor component member abutting on each other. The turbine rotor includes: a cylindrical recessed portion that is formed at the abutting end surface and is recessed in an axial direction; an axial passage bored from a bottom surface of the cylindrical recessed portion in the axial direction; an introduction passage introducing the cooling medium into the axial passage; a discharge passage discharging the cooling medium from the axial passage; and a sealing member that is arranged in the cylindrical recessed portion and seals one end of the axial passage.

Abstract: In a vehicle power supply system, when a main power supply device is normal, a backup controller turns on a switch circuit and turns off a switch circuit to supply power from the main power supply device to a load unit LD1 and a load unit, and can travel a vehicle in a normal mode which is in a normal driving state. On the other hand, when the main power supply device is abnormal, the backup controller supplies power from the backup battery to the load unit and does not supply power from the backup battery to the load unit by turning on the switch circuit and turning off the switch circuit, and can travel the vehicle in the limit mode in which the functions are more limited than in the normal mode.

Abstract: In a vehicle power-supply system, a backup power-supply device includes a low-voltage DC/DC converter, a backup battery, and switching mechanisms. A bidirectional switch unit is provided between a high-voltage DC/DC converter and a connecting point on a connecting wire and passes or interrupts a current flowing between the high-voltage DC/DC converter and the connecting point. A bidirectional switch unit is provided between the connecting point and a connecting point on a connecting wire and passes or interrupts a current flowing between the connecting point and the connecting point. A unidirectional switch unit is provided between the connecting point and the low-voltage DC/DC converter on the connecting wire and passes or interrupts a current flowing from the connecting point to the low-voltage DC/DC converter.

Abstract: In a vehicle power supply system, when a main power supply device is normal, a backup controller turns on a switch circuit and turns off a switch circuit to supply power from the main power supply device to a load unit LD1 and a load unit, and can travel a vehicle in a normal mode which is in a normal driving state. On the other hand, when the main power supply device is abnormal, the backup controller supplies power from the backup battery to the load unit and does not supply power from the backup battery to the load unit by turning on the switch circuit and turning off the switch circuit, and can travel the vehicle in the limit mode in which the functions are more limited than in the normal mode.