Abstract: A shower head assembly, which is disposed in a film forming apparatus that alternately repeats film formation and etching to form a metal film in a recess formed in a substrate, includes: a first plate having arc-shaped first slits formed in the first plate; and a second plate having arc-shaped second slits formed in the second plate, wherein the second plate is disposed below the first plate to vertically overlap with the first plate, and the second slits are formed at locations such that the second slits do not overlap with the first slits in a plan view.

Abstract: A coil has 1st to Nth turns. The 1st to Nth turns respectively provided with actuation parts for current in one direction to flow, and connection parts for current in the opposite direction to the one direction to flow. The plurality of actuation parts are arranged substantially parallel to each other, and are arranged along a surface of an object or a surface that approximates to the surface of the object. A plurality of connection parts are arranged within a space in which the connection parts do not face the surface of the object over the actuation parts of the 1st to Nth turns, and the connection parts are positioned at the sides with respect to the extension direction of the actuation parts.

Abstract: A coil 31 has 1st to Nth turns 311 to 31N. The 1st to Nth turns 311 to 31N are respectively provided with actuation parts 311a for current in one direction to flow, and connection parts 311b for current in the opposite direction to the one direction to flow. The plurality of actuation parts 311a are arranged substantially parallel to each other, and are arranged along a surface of an object 1 or a surface that approximates to the surface of the object 1. A plurality of connection parts 311b are arranged within a space in which the connection parts do not face the surface of the object 1 over the actuation parts 311a of the 1st to Nth turns, and the connection parts are positioned at the sides with respect to the extension direction of the actuation parts 311a.