Abstract: In one exemplary embodiment, there is provided an etching method. The method includes (a) preparing a substrate, the substrate comprising a silicon-containing film and a mask, the silicon-containing film including a recess, the mask being provided on the silicon-containing film and including an opening that exposes the recess; (b) forming a carbon-containing film on a side wall of the silicon-containing film, the side wall defining the recess; and (c) by using a plasma generated from a processing gas, forming a protective film containing tungsten on the carbon-containing film and etching the silicon-containing film in the recess, the processing gas including a fluorine-containing gas and a tungsten-containing gas.

Abstract: A stator unit includes a main circuit board parallel to an up-and-down direction, a sub circuit board at a right angle to the main circuit board, a magnetic sensor on the sub circuit board, and a housing including a sub circuit board space that is located adjacent to an inner space of the stator unit in which a can is disposed. The sub circuit board includes a first end connected to the main circuit board via a circuit board terminal and a second end located near the inner space in the sub circuit board space. The magnetic sensor is located closer to the inner space than the circuit board terminal is.

Abstract: There is provided a disc brake device in which a plurality of annular seals that are disposed coaxially with rotation members, in which the annular seals are sandwiched in an axial direction between a caliper and a housing, and in which a position restriction portion includes: at least one caliper-side restriction portion provided on the caliper, which is disposed non-coaxially with the rotation member and is configured to serve as a reference of a position of the rotation member; and at least one housing-side restriction portion provided on the housing, which is disposed non-coaxially with an output member and is configured to serve as a reference of a position of the output member, and is configured to restrict a position of the housing with respect to the caliper by bringing the caliper-side restriction portion and the housing-side restriction portion into contact with each other.

Abstract: A shock absorber according to the present invention is configured to include: a shock absorber main body in which an outer tube and a rod axially movably inserted into the outer tube are included; a suspension spring formed of a coil spring disposed on the outer periphery of the shock absorber main body; a rod-side spring seat attached to the rod and supporting one end of the suspension spring; an annular tube-side spring seat screwed to a screw portion provided on the outer periphery of the outer tube and supporting the other end of the suspension spring; a slider to be placed on the outer periphery of the outer tube with only an axial movement is permitted; a connecting portion that detachably connects the tube-side spring seat to the slider; and a rotation regulating portion that regulates a rotation of the tube-side spring seat and the slider relative to each other about the axis of the outer tube in a state where the tube-side spring seat and the slider are connected to each other.

Abstract: A shock absorber includes: a collar which is mounted on an outer circumference of a cylinder movable in the axial direction with respect to an inner tube in which a liquid is stored and supports one end of a suspension spring. The collar has: an annular mounting portion whose one end is supported by the cylinder; an annular sliding contact portion provided to be closer to the suspension spring than the mounting portion and in sliding contact with an inner circumference of the inner tube; a truncated cone-shaped body portion that connects the mounting portion and the sliding contact portion and has a hole formed to apply a resistance against a flow of a liquid moving inside and outside the collar; and a rib formed on an inner circumference of the body portion along the axial direction.

Abstract: A shock absorber includes: a collar which is mounted on an outer circumference of a cylinder movable in the axial direction with respect to an inner tube in which a liquid is stored and supports one end of a suspension spring. The collar has: an annular mounting portion whose one end is supported by the cylinder; an annular sliding contact portion provided to be closer to the suspension spring than the mounting portion and in sliding contact with an inner circumference of the inner tube; a truncated cone-shaped body portion that connects the mounting portion and the sliding contact portion and has a hole formed to apply a resistance against a flow of a liquid moving inside and outside the collar; and a rib formed on an inner circumference of the body portion along the axial direction.