Abstract: A substrate processing apparatus includes: a carrier block, into which a carrier storing a substrate is carried; a processing block including a liquid processing module that supplies a processing liquid to the substrate transferred from the carrier block, thereby performing a liquid processing; and an interface block, to which the substrate is transferred from the processing block. The interface block includes a liquid storage, in which a bottle storing the processing liquid is disposed. The carrier block includes a liquid feeder that feeds the processing liquid supplied from the liquid storage, to the liquid processing module. The liquid feeder includes a filter that filters the processing liquid supplied from the liquid storage, and a first pump that pumps the processing liquid toward the liquid processing module.

Abstract: A dual solution candidate searcher receives an input of information about a constraint coefficient matrix and a cost vector, determines a dual problem of a linear programming problem being a primal problem and all active sets representing combinations of active formulas in constraints of the dual problem, finds, for each of the active sets, a feasible dual solution candidate meeting constraints, and stores the dual solution candidate into a storage in a manner associated with a corresponding one of the active sets. An optimal solution calculation device receives an input of a constraint vector as, selects an optimal one of the active sets as an optimal active set based on an inner product of the constraint vector and the dual solution candidate stored in the storage, and finds and outputs a basic feasible solution corresponding to the selected active set as an optimal solution.

Abstract: A thin film has a band gap of 2.2 eV or more and in which a crystal includes an atomic vacancy and an electron, a microwave irradiation system configured to irradiate the thin film with a microwave in response to driving from outside, an excitation unit configured to excite the electron included in the thin film in response to driving from outside, and a detector configured to detect, as an electric signal, at least either one of an intensity of light outputted from the thin film when the electron transitions from an excited state to a ground state and a change in conductivity of the thin film based on excitation.

Abstract: The present disclosure provides a negative electrode material that can improve the cycle characteristics of a battery. The negative electrode material according to the present disclosure contains a reduced form of a solid electrolyte material. The solid electrolyte material is denoted by Formula (1): Li?M?X?. Herein, in Formula (1), each of ?, ?, and ? is a value greater than 0, M represents at least one element selected from the group consisting of metal dements except Li and semimetals, and X represents at least one dement selected from the group consisting of F, Cl, Br, and I.

Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.

Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.

Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.

Abstract: A liquid processing apparatus includes a processing liquid supply including a nozzle configured to discharge a processing liquid; a nozzle mover configured to move the nozzle between a coating position and a standby position; a suction unit including a suction opening toward a leading end surface of the nozzle located at the standby position; a cleaning unit configured to clean the leading end surface of the nozzle located at the standby position with a cleaning liquid; and a control device. The control device controls the processing liquid supply to discharge the processing liquid in a state that the nozzle is located at the standby position. The control device controls the suction unit to suck the processing liquid. The control device controls the cleaning unit to supply the cleaning liquid toward the standby position to clean the nozzle. The control device controls the suction unit to suck the cleaning liquid.

Abstract: A liquid processing apparatus includes a processing liquid supply including a nozzle configured to discharge a processing liquid; a nozzle mover configured to move the nozzle between a coating position and a standby position; a suction unit including a suction opening toward a leading end surface of the nozzle located at the standby position; a cleaning unit configured to clean the leading end surface of the nozzle located at the standby position with a cleaning liquid; and a control device. The control device controls the processing liquid supply to discharge the processing liquid in a state that the nozzle is located at the standby position. The control device controls the suction unit to suck the processing liquid. The control device controls the cleaning unit to supply the cleaning liquid toward the standby position to clean the nozzle. The control device controls the suction unit to suck the cleaning liquid.