Abstract: Provided are a liquid jet head and a liquid jet apparatus in which it is possible to securely connect drawn wires and connection wires and to improve reliability. Connection portions 91 of drawn wires 90 drawn from piezoelectric elements 300 and pad portions 101 of a drive IC 100 for driving the piezoelectric elements 300 are connected by connection wires 110 formed by wire bonding and extended in directions intersecting drawing directions of the connection portions 91. Accordingly, the connection wires 110 and the drawn wires 90 are suitably connected.

Abstract: A liquid-jet head, a manufacturing method thereof and a liquid-jet apparatus are provided, the liquid-jet head capable of preventing damage to a vibration plate, easily and surely preventing damage to a piezoelectric element attributable to an external environment, simplifying a manufacturing process and improving a withstand voltage of the piezoelectric element.

Abstract: A method of manufacturing an ink jet print head is provided. The method forms, on a silicon monocrystailine substrate, a first etching pattern for forming pressure generating chambers and a second etching pattern located opposite to the first etching pattern with respect to ink supply ports. The second etching pattern is narrower than the first etching pattern and is located within opposite lines defining the first etching pattern. The method also anisotropically etches the silicon monocrystailline from the surface thereof, on which the first and second etching patterns are formed, to the other surface thereof and anisotropically etches areas of the silicon monocrystalline substrate. Also, each of the areas is located between the first and second etching patterns, to a depth suitable for the ink supply ports.

Abstract: An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piez

Abstract: Provided are a liquid jet head and a liquid jet apparatus in which it is possible to securely connect drawn wires and connection wires and to improve reliability. Connection portions 91 of drawn wires 90 drawn from piezoelectric elements 300 and pad portions 101 of a drive IC 100 for driving the piezoelectric elements 300 are connected by connection wires 110 formed by wire bonding and extended in directions intersecting drawing directions of the connection portions 91. Accordingly, the connection wires 110 and the drawn wires 90 are suitably connected.

Abstract: A liquid-jet head, a manufacturing method thereof and a liquid-jet apparatus are provided, the liquid-jet head capable of preventing damage to a vibration plate, easily and surely preventing damage to a piezoelectric element attributable to an external environment, simplifying a manufacturing process and improving a withstand voltage of the piezoelectric element.

Abstract: In an ink jet print head, a fluid passage forming substrate includes pressure generating chambers being trapezoidal in shape, each pressure generating chamber having walls substantially parallel to the flowing direction of ink, and no stagnation of ink is present in the pressure generating chambers. The pressure generating chambers' walls include first walls vertical to the surface of the silicon monocrystalline substrate and oriented in the orientation of the pressure generating chambers, and second walls slanted at an angle of 35° with respect to the surface of the substrate, the second walls being formed at both ends of each pressure generating chamber. An elastic plate is fastened onto first opening-formed sides of the pressure generating chambers and piezoelectric layers for expanding and contracting the pressure generating chambers are mounted on the surface of the elastic plate.

Abstract: A liquid-jet head in which a wiring structure is simplified to achieve miniaturization and a liquid-jet apparatus are disclosed.

Abstract: A method for manufacturing an ink jet print head includes forming a fluid passage forming substrate. The substrate has pressure generating chambers that are trapezoidal in shape and are formed by anisotropically etching a silicon monocrystalline substrate.

Abstract: A liquid-jet head, a manufacturing method thereof and a liquid-jet apparatus are provided, the liquid-jet head capable of preventing damage to a vibration plate, easily and surely preventing damage to a piezoelectric element attributable to an external environment, simplifying a manufacturing process and improving a withstand voltage of the piezoelectric element.

Abstract: An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piez

Abstract: An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piez

Abstract: A liquid-jet head in which a wiring structure is simplified to achieve miniaturization and a liquid-jet apparatus are disclosed.

Abstract: In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.

Abstract: An ink jet recording head comprises a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element a lower electrode provided on an area facing the pressure generating chamber via an insulating layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. At least both ends of the lower electrode in a width direction thereof are positioned within the area facing the pressure generating chamber, and the piezoelectric layer covers sides of both ends of the lower electrode in the width direction thereof.

Abstract: In an ink jet print head, a fluid passage forming substrate includes pressure generating chambers being trapezoidal in shape, each pressure generating chamber having walls substantially parallel to the flowing direction of ink, and no stagnation of ink is present in the pressure generating chambers. The pressure generating chambers′ walls include first walls vertical to the surface of the silicon monocrystalline substrate and oriented in the orientation of the pressure generating chambers, and second walls slanted at an angle of 35° with respect to the surface of the substrate, the second walls being formed at both ends of each pressure generating chamber. An elastic plate is fastened onto first opening-formed sides of the pressure generating chambers and piezoelectric layers for expanding and contracting the pressure generating chambers are mounted on the surface of the elastic plate.

Abstract: In an ink jet print head, a fluid passage forming substrate includes pressure generating chambers being trapezoidal in shape, each pressure generating chamber having walls substantially parallel to the flowing direction of ink, and no stagnation of ink is present in the pressure generating chambers. The pressure generating chambers' walls include first walls vertical to the surface of the silicon monocrystalline substrate and oriented in the orientation of the pressure generating chambers, and second walls slanted at an angle of 35° with respect to the surface of the substrate, the second walls being formed at both ends of each pressure generating chamber. An elastic plate is fastened onto first opening-formed sides of the pressure generating chambers and piezoelectric layers for expanding and contracting the pressure generating chambers are mounted on the surface of the elastic plate.

Abstract: In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.

Abstract: In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.

Abstract: An ink jet recording head which can compensate for shortage of mechanical strength of an ink reservoir by preventing the piezoelectric film on an ink reservoir from cracking or being broken due to the vibration of a piezoelectric film or flowing or mechanical vibration of ink. The ink reservoir has at least two plane orientations at its bottom and is given different depths.