Abstract: A method for detecting an endpoint of a seasoning process for a plasma tool includes (a) operating the plasma tool to run a seasoning recipe on at least one seasoning wafer before running a monitoring recipe on at least one monitoring wafer; (b) collecting, while running the monitoring recipe on the monitoring wafer, monitoring data associated with the running the monitoring recipe; and (c) generating an estimated product parameter using a virtual metrology (VM) model that is configured to estimate a product parameter using the monitoring data. The VM model is based on production data associated with running a production recipe on production wafers and product parameters of the production wafers measured after the running the production recipe. The endpoint of the seasoning process is obtained by repeating (a), (b) and (c), and the endpoint is obtained when the estimated product parameter stabilizes.

Abstract: A method for detecting an endpoint of a seasoning process for a plasma tool includes (a) operating the plasma tool to run a seasoning recipe on at least one seasoning wafer before running a monitoring recipe on at least one monitoring wafer; (b) collecting, while running the monitoring recipe on the monitoring wafer, monitoring data associated with the running the monitoring recipe; and (c) generating an estimated product parameter using a virtual metrology (VM) model that is configured to estimate a product parameter using the monitoring data. The VM model is based on production data associated with running a production recipe on production wafers and product parameters of the production wafers measured after the running the production recipe. The endpoint of the seasoning process is obtained by repeating (a), (b) and (c), and the endpoint is obtained when the estimated product parameter stabilizes.

Abstract: A molded transformer includes a transformer body including a coil bobbin having a spool having a central through-hole and a collar at each of two ends thereof, and a conductive wire, such as a copper wire, wound around the spool, and an EE type or EI type ferrite core which is inserted into the coil bobbin; and a thermoplastic resin for molding the transformer body in such a manner that only a terminal portion used for mounting is exposed through the resin. The resin has a low molecular weight, ensuring a low molding stress and a low melting viscosity.

Abstract: An encased transformer that comprises a bobbin including a plastic-molded cylindrical portion and upper and lower collars formed respectively at upper and lower ends of the cylindrical portion, a magnetic element extending centrally through the cylindrical portion, primary and secondary coils wound round the outer periphery of the cylindrical portion, comb-shaped metals terminal formed on the pair of lower collars by insert molding, the comb-shaped portion of each metal terminal being bent at generally right angles, the metal terminals being further bent at right angles and outwardly horizontally at an end portion thereof so that the metal terminal is substantially Z-shaped, a straight portion of the metal terminal positioned midways of the Z-shaped being fixedly held in position between the inner wall of a case and a frame wall having recessed terminal grooves into which are individually fitted metal terminals provided in a plastic square bottom plate.