Patents by Inventor Yutaka Katahara

Yutaka Katahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Acceleration sensor having single and multi-layer substrates
    Patent number: 7673514
    Abstract: An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.
    Type: Grant
    Filed: December 14, 2007
    Date of Patent: March 9, 2010
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Teruya Fukaura, Shinichiro Katsuki, Yutaka Katahara, Seishi Shibata
  • Acceleration sensor
    Publication number: 20080105053
    Abstract: An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.
    Type: Application
    Filed: December 14, 2007
    Publication date: May 8, 2008
    Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA
    Inventors: Teruya Fukaura, Shinichiro Katsuki, Yutaka Katahara, Seishi Shibata
  • Acceleration sensor
    Patent number: 7331228
    Abstract: An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.
    Type: Grant
    Filed: October 25, 2005
    Date of Patent: February 19, 2008
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Teruya Fukaura, Shinichiro Katsuki, Yutaka Katahara, Seishi Shibata
  • Acceleration sensor
    Publication number: 20060179942
    Abstract: An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.
    Type: Application
    Filed: October 25, 2005
    Publication date: August 17, 2006
    Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA
    Inventors: Teruya Fukaura, Shinichiro Katsuki, Yutaka Katahara, Seishi Shibata