Patents by Inventor Yutaka Saijo

Yutaka Saijo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sample measuring device
    Patent number: 7589322
    Abstract: An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement.
    Type: Grant
    Filed: June 28, 2006
    Date of Patent: September 15, 2009
    Assignee: Horiba, Ltd.
    Inventors: Kentaro Nishikata, Yutaka Saijo, Shigeru Kakinuma, Junichi Aoyama, Satoshi Ohashi
  • Sample measuring device
    Publication number: 20070023655
    Abstract: An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement.
    Type: Application
    Filed: June 28, 2006
    Publication date: February 1, 2007
    Inventors: Kentaro Nishikata, Yutaka Saijo, Shigeru Kakinuma, Junichi Aoyama, Satoshi Ohashi
  • Spectral ellipsometer without chromatic aberrations
    Patent number: 6714301
    Abstract: A spectral ellipsometer includes a light incident optical system for focusing a incidence spot of polarized light of multi-wavelengths onto a sample surface. A detecting optical system receives the reflected light influenced by the sample surface so that the amount of change in an elliptical polarization will be characteristic of the sample surface. A spherical prism polarizer is employed in the light incident optical system having complimentary curved light incident and light exit surfaces to enable the focusing of the incident light so that each of the ray traces of the range of wavelengths are focused at the same position on the sample surface.
    Type: Grant
    Filed: October 23, 2001
    Date of Patent: March 30, 2004
    Assignee: Horiba, Ltd.
    Inventors: Kunio Otsuki, Yutaka Saijo
  • Spectral ellipsometer without chromatic aberrations
    Publication number: 20020126284
    Abstract: A spectral ellipsometer includes a light incident optical system for focusing a incidence spot of polarized light of multi-wavelengths onto a sample surface. A detecting optical system receives the reflected light influenced by the sample surface so that the amount of change in an elliptical polarization will be characteristic of the sample surface. A spherical prism polarizer is employed in the light incident optical system having complimentary curved light incident and light exit surfaces to enable the focusing of the incident light so that each of the ray traces of the range of wavelengths are focused at the same position on the sample surface.
    Type: Application
    Filed: October 23, 2001
    Publication date: September 12, 2002
    Inventors: Kunio Otsuki, Yutaka Saijo