Patents by Inventor Yutaka Yamasaki

Yutaka Yamasaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230055853
    Abstract: A separating method includes holding a combined substrate and separating a first substrate. In the holding of the combined substrate, the combined substrate in which the first substrate and a second substrate are bonded is held. In the separating of the first substrate, the first substrate is separated from the combined substrate, starting from a side surface of the combined substrate. The separating of the first substrate includes brining a fluid containing water into contact with the side surface.
    Type: Application
    Filed: August 17, 2022
    Publication date: February 23, 2023
    Inventors: Takashi Terada, Yuji Mimura, Hiroshi Maeda, Kazutaka Noda, Masaru Honda, Ryoichi Sakamoto, Yutaka Yamasaki, Tatsuya Kitayama, Akira Fukutomi
  • Publication number: 20220384386
    Abstract: A bonding system includes a surface modifying apparatus and a bonding apparatus. The surface modifying apparatus is configured to modify a bonding surface of a substrate to be bonded to another substrate with plasma of a processing gas. The bonding apparatus is configured to bond two substrates modified by the surface modifying apparatus by an intermolecular force. The surface modifying apparatus includes: a processing chamber configured to accommodate therein the substrate; a processing gas supply configured to supply a processing gas containing moisture into the processing chamber; and a plasma forming unit configured to form the plasma of the processing gas containing the moisture.
    Type: Application
    Filed: May 26, 2022
    Publication date: December 1, 2022
    Inventors: Yuji Mimura, Hiroshi Maeda, Takashi Terada, Masaru Honda, Ryoichi Sakamoto, Yutaka Yamasaki
  • Publication number: 20220285196
    Abstract: A bonding apparatus configured to bond a first substrate and a second substrate includes a first holder configured to hold the first substrate; a second holder disposed to face the first holder, and configured to hold the second substrate; two imaging units each including a first imaging device configured to image a first alignment mark formed on a bonding surface of the first substrate and a second imaging device configured to image a second alignment mark formed on a bonding surface of the second substrate; a first moving mechanism configured to move the two imaging units along a first direction in a planar region between the first holder and the second holder; a second moving mechanism configured to move the first imaging unit along a second direction orthogonal to the first direction; and a third moving mechanism configured to move the second imaging unit along the second direction.
    Type: Application
    Filed: April 27, 2020
    Publication date: September 8, 2022
    Inventors: Yutaka Yamasaki, Takashi Terada
  • Publication number: 20220277979
    Abstract: A bonding apparatus configured to bond a first substrate and a second substrate includes: a first holder configured to hold the first substrate; a second holder disposed to face the first holder in a vertical direction, and configured to hold the second substrate; a processing vessel accommodating the first holder and the second holder therein; and a horizontal position adjuster provided outside the processing vessel and connected to the first holder via a support supporting the first holder, the horizontal position adjuster being configured to adjust a horizontal position of the first holder.
    Type: Application
    Filed: April 27, 2020
    Publication date: September 1, 2022
    Inventors: Yutaka Yamasaki, Takashi Terada
  • Patent number: 11417543
    Abstract: A bonding apparatus includes a first holder, a second holder, an imaging unit and a moving device. The first holder is configured to hold a first substrate. The second holder is disposed to face the first holder and configured to hold a second substrate to be bonded to the first substrate. The imaging unit includes a first imaging device configured to image a first alignment mark formed on a surface of the first substrate facing the second substrate and a second imaging device configured to image a second alignment mark formed on a surface of the second substrate facing the first substrate. The moving device is configured to move the imaging unit in a first direction and a second direction intersecting with the first direction within a plan region between the first holder and the second holder.
    Type: Grant
    Filed: July 11, 2019
    Date of Patent: August 16, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yoshitaka Otsuka, Munehisa Kodama, Yutaka Yamasaki
  • Publication number: 20200020553
    Abstract: A bonding apparatus includes a first holder, a second holder, an imaging unit and a moving device. The first holder is configured to hold a first substrate. The second holder is disposed to face the first holder and configured to hold a second substrate to be bonded to the first substrate. The imaging unit includes a first imaging device configured to image a first alignment mark formed on a surface of the first substrate facing the second substrate and a second imaging device configured to image a second alignment mark formed on a surface of the second substrate facing the first substrate. The moving device is configured to move the imaging unit in a first direction and a second direction intersecting with the first direction within a plan region between the first holder and the second holder.
    Type: Application
    Filed: July 11, 2019
    Publication date: January 16, 2020
    Inventors: Yoshitaka Otsuka, Munehisa Kodama, Yutaka Yamasaki
  • Publication number: 20130173079
    Abstract: According to one embodiment, in order to manage the power consumption at a user's electrical apparatuses, the user's activity schedule is registered in various patterns, and the operation schedule of the electrical apparatuses is stored in various patterns. The operation schedule of the electrical apparatuses is specified in accordance with the user's activity schedule registered. The electrical apparatuses are controlled in accordance with the operating schedule thus specified. The power consumption at the home appliances can thereby be appropriately managed in various conditions, to meet the user's activity schedule and preference.
    Type: Application
    Filed: August 31, 2012
    Publication date: July 4, 2013
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hiroshi Taira, Masashige Yogo, Yutaka Yamasaki
  • Patent number: 5757002
    Abstract: A light source pa light of a plurality of wavelengths of a near infrared region, and a spectroscopic part selects a wavelength subjected to absorption by lactic acid as a measuring wavelength from measuring light of a plurality of wavelengths emitted from the light source part. A probe comes into contact with an organism measuring portion and irradiates the organism measuring portion with the measuring light of the wavelength selected by the spectroscopic part, while a photoreceiving part detects transmitted/scattered light of the measuring light incident upon the organism measuring portion. A light signal detected by the photoreceiving part is converted to absorbance in a signal processing part, so that the concentration of lactic acid is calculated by a host computer serving as an arithmetic-control part and displayed on a display part. No reagent is required, while difference between lactic acid concentrations varied with measuring portions can also be noninvasively measured.
    Type: Grant
    Filed: August 29, 1996
    Date of Patent: May 26, 1998
    Assignee: Kyoto Dai-Ichi Kagaku Co., Ltd.
    Inventors: Yutaka Yamasaki, Hisashi Okuda, Koji Matsuoka, Kexin Xu
  • Patent number: 5751418
    Abstract: In an optical measuring apparatus of the present invention, a spectroscopic optical system emits a measuring light beam that contains a measure light component of a measure wavelength domain where a measured object absorbs part of the light and a reference light component of a reference wavelength domain where the measured object almost completely absorbs the light, and separates the beam into beams, a photometric unit measures the light incident on an integrating sphere when a reference sample is inserted in the light path and stores the measurements in a memory and also measures the light incident on an integrating sphere when a measured object is inserted in the light path, and an arithmetic circuit calculates a light intensity ratio of the compensation light component for the measured object to the compensation light component stored in memory and then estimates background intensities during the measurement by multiplying the measurements stored in the memory by the intensity ratio.
    Type: Grant
    Filed: May 10, 1996
    Date of Patent: May 12, 1998
    Assignees: Kurashiki Boseki Kabushiki Kaisha, Kyoto Daiichi Kagaku Co., Ltd.
    Inventors: Eiichi Kimura, Naoki Yanai, Motonobu Shiomi, Emi Ashibe, Yutaka Yamasaki, Harumi Uenoyama
  • Patent number: 5741660
    Abstract: As to reaction solutions in which the amount of each potassium ferricyanate, glucose oxidase and glucose substrate are set at a constant value while glucose concentrations are varied, intensity changes of peaks at a shift wavenumber of 2081 cm.sup.-1 in light scattering spectra are measured every 10 seconds, the maximum values of the intensity changes of the peaks at the respective glucose concentrations obtained, for obtaining a calibration curve from correlations between the maximum values of the reaction velocities and the glucose concentrations. The calibration curve is employed for carrying out quantitative measurement of an unknown sample.
    Type: Grant
    Filed: January 30, 1996
    Date of Patent: April 21, 1998
    Assignee: Kyoto Dai-ichi Kagaku Co., Ltd.
    Inventors: Xiaoming Dou, Yutaka Yamasaki, Harumi Uenoyama, Yoshinori Yamaguchi
  • Patent number: 5615009
    Abstract: A method of quantitative analysis of a specific component of an object to be measured comprises steps of measuring an energy spectrum of light transmitted through or reflected from the object, dividing the energy spectrum into a plurality of wavelength domains, thereby obtaining a plurality of partial energy spectra, normalizing the plurality of partial energy spectra within each wavelength domain using an energy measured at a predetermined wavelength contained in each wavelength domain, and performing the quantative analysis by multivariate analysis using the plurality of partial energy spectra having been normalized.
    Type: Grant
    Filed: April 12, 1996
    Date of Patent: March 25, 1997
    Assignees: Kyoto Daiichi Kagaku Co., Ltd., Kurashiki Boseki Kabushiki Kaisha
    Inventors: Takeshi Sakura, Yutaka Yamasaki, Hiroko Kubo, Kexin Xu, Motonobu Shiomi
  • Patent number: 5602647
    Abstract: An apparatus and method for optically measuring concentrations of components allow enhancement in measurement accuracy of concentration. The apparatus includes a cell, a light irradiator, a photodetector, and an arithmetic unit. The cell presents different optical path lengths at different locations and is to contain a sample therein. The light irradiator, which includes a variable-wavelength laser generator and a measuring system composed of convex lenses, outputs a collimated, enlarged laser beam, and makes the laser beam incident upon the cell. The photodetector comprises a multiplicity of photodetectors arranged in parallel to the surface of the cell, so that it can detect intensity of rays of transmitted light that have traveled over different optical path lengths at positions of an equal distance from the cell.
    Type: Grant
    Filed: November 27, 1995
    Date of Patent: February 11, 1997
    Assignee: Kyoto Daiichi Kagaku Co., Ltd.
    Inventors: Kexin Xu, Yutaka Yamasaki, Harumi Uenoyama, Takeshi Sakura
  • Patent number: 5573005
    Abstract: A syringe for collecting expiration is switched, to be connected by a three-way electromagnetic valve, between an expiration blowing part and a measuring part, so that expiration, blown from the expiration blowing part, is collected in the syringe while replacing old expiration. A switching valve is closed upon completion of exhalation so that end-tidal air is collected in the syringe. Thereafter the expiration sample is introduced into the measuring part from the syringe so that a constant amount of the expiration sample is collected by the measuring part to be introduced into a column.
    Type: Grant
    Filed: October 24, 1994
    Date of Patent: November 12, 1996
    Assignee: Kyoto Dai-ichi Kagaku Co. Ltd.
    Inventors: Hideo Ueda, Mitsuo Hiromoto, Meng Gang, Yutaka Yamasaki
  • Patent number: 5533513
    Abstract: An expiration suction passage communicating with an expiration blowing part provided with a non-airtight mask is connected to a forward end surface of a syringe through a two-way on-off electromagnetic valve, while an expiration transmission passage communicating with a sample outlet is also connected to the forward end surface of the syringe. A two-way on-off electromagnetic valve is provided in the expiration transmission passage, and an O.sub.2 sensor is provided between the electromagnetic valve and the sample outlet as a standard gas sensor. The syringe has a capacity capable of collecting several breaths, and a sucking operation is driven at a speed for collecting several breaths in single suction.
    Type: Grant
    Filed: October 24, 1994
    Date of Patent: July 9, 1996
    Assignee: Kyoto Dai-Ichi Kagaku Co., Ltd.
    Inventors: Hideo Ueda, Mitsuo Hiromoto, Meng Gang, Yutaka Yamasaki
  • Patent number: 5495744
    Abstract: A first sample measuring passage provided between a collection port and a suction pump has a sample gas measurer for measuring expiration components, while a second sample measuring passage which is provided in parallel with the first sample measuring passage has a standard gas measurer for measuring O.sub.2 gas. Assuming that [A] represents a measured value of a target component in an expiration sample and [b.sub.1 ] represents O.sub.2 concentration in the expiration sample, correction is made on the basis of:[M]=f.sub.1 .multidot.(21-[a.sub.1 ]) [A]/(21-[b.sub.1 ])where [M] represents the corrected measured value of the target component, [a.sub.1 ] represents O.sub.2 concentration in end-tidal air which is supplied as a constant such as 15.3, for example, and f.sub.1 represents an experimentally prescribed coefficient such as 1.67, for example.
    Type: Grant
    Filed: October 24, 1994
    Date of Patent: March 5, 1996
    Assignee: Kyoto Dai-Ichi Kagaku Co., Ltd.
    Inventors: Hideo Ueda, Mitsuo Hiromoto, Meng Gang, Yutaka Yamasaki
  • Patent number: 5475234
    Abstract: An apparatus and method for measuring component concentrations which enables accurate measurement of concentrations of component within an object in a non-destructive, non-invasive, and bloodless procedure.
    Type: Grant
    Filed: July 26, 1994
    Date of Patent: December 12, 1995
    Assignee: Kyoto Daiichi Kagaku Co., Ltd.
    Inventors: Kexin Xu, Yutaka Yamasaki, Harumi Uenoyama, Takeshi Sakura
  • Patent number: 5232355
    Abstract: A scroll-type fluid apparatus includes a housing whose interior is divided by upper and lower partitioning walls into chambers one over another, i.e., a discharge chamber communicating with a discharge port, an inlet chamber communicating with an inlet port and a drive chamber accommodating therein a motor. A first scroll member is disposed in the inlet chamber and has a lower surface formed integral with a first spiral scroll vane. A second scroll member is disposed in the inlet chamber at a location below the first scroll member and has a lower surface provided with a rotatable shaft which is rotatably supported in the lower partitioning wall. The second scroll member is integrally provided on an upper surface thereof with a second spiral scroll vane which is in mesh with the first scroll vane to form a plurality of variable-volume chambers. An oil pump is provided in the discharge chamber for supplying lubricant to contacting parts of the first and second scroll members.
    Type: Grant
    Filed: May 13, 1992
    Date of Patent: August 3, 1993
    Assignee: Mitsubishi Denki K.K.
    Inventors: Kozaburo Fujii, Yutaka Yamasaki