Patents by Inventor Yutaka Yuasa
Yutaka Yuasa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12129544Abstract: The cleaning method according to an embodiment of the present invention is for cleaning a plasma processing apparatus that performs a plasma processing on a substrate. This cleaning method includes: forming a protective film; and cleaning. The forming the protective film involves forming the protective film in a plasma generation region by generating plasma while supplying a film-forming gas into a processing container in which a processing space including the plasma generation region and a diffusion region is formed. The cleaning involves cleaning an interior of the processing container in which the protective film has been formed by generating plasma while supplying a cleaning gas into the processing container.Type: GrantFiled: March 29, 2021Date of Patent: October 29, 2024Assignee: TOKYO ELECTRON LIMITEDInventors: Yoshiyuki Kondo, Yutaka Fujino, Hiroyuki Ikuta, Hideki Yuasa
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Publication number: 20240298548Abstract: A magnetoresistive element according to the present embodiment includes a first magnetic layer (11) stacked on a base layer (10), a second magnetic layer (13), and a first nonmagnetic layer (12) arranged between the first magnetic layer (11) and the second magnetic layer (13). The first nonmagnetic layer (12) includes an insulating material including fluorine.Type: ApplicationFiled: February 4, 2022Publication date: September 5, 2024Inventors: YUTAKA HIGO, LUI SAKAI, MASAKI ENDO, HIROYUKI OHMORI, MASANORI HOSOMI, TAKAYUKI NOZAKI, KAY YAKUSHIJI, MAKOTO KONOTO, TATSUYA YAMAMOTO, TOMOHIRO NOZAKI, SHINJI YUASA
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Patent number: 12077865Abstract: A film forming method of forming a film on a substrate by using a film forming apparatus including a processing container, and a stage provided in an interior of the processing container to place the substrate thereon and in which aluminum is contained, includes: forming a film continuously on one substrate or on a plurality of substrates by supplying a gas for film formation to the interior of the processing container while heating the substrate placed on the stage; cleaning the interior of the processing container with a fluorine-containing gas in a state in which the substrate is unloaded from the processing container; and performing a post-process by generating plasma of an oxygen- and hydrogen-containing-gas in the interior of the processing container, wherein the forming the film, the cleaning the interior of the processing container, and the performing the post-process are repeatedly performed.Type: GrantFiled: August 19, 2022Date of Patent: September 3, 2024Assignee: Tokyo Electron LimitedInventors: Hideki Yuasa, Hiroyuki Ikuta, Yutaka Fujino, Makoto Wada, Hirokazu Ueda
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Patent number: 12060641Abstract: A film forming method includes: placing a substrate on which a pattern, which includes a plurality of convex and concave portions, is formed on a stage disposed inside a chamber; and selectively forming a silicon-containing film on the plurality of convex portions of the pattern by applying a bias power to the stage and introducing microwaves into the chamber while supplying a processing gas containing a silicon-containing gas and a nitrogen-containing gas into the chamber to generate plasma, wherein the selectively forming the silicon-containing film includes a first film formation of forming a silicon-containing film around upper sides of the plurality of convex portions and a second film formation of forming a silicon-containing film on upper portions of the plurality of convex portions.Type: GrantFiled: January 18, 2022Date of Patent: August 13, 2024Assignee: TOKYO ELECTRON LIMITEDInventors: Hirokazu Ueda, Hideki Yuasa, Yutaka Fujino, Yoshiyuki Kondo, Hiroyuki Ikuta
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Publication number: 20170334190Abstract: A gas collection device of a printing press includes an organic compound treatment system (33) including a gas chamber (34). The device includes a cover (3) configured to cover a print unit (2) of a printing press. The device includes a gas transfer device (4) configured to suck a gas of a volatile organic compound produced in the print unit (2) from the inside of the cover 3 and transfer the gas to the gas chamber (34). It is possible to provide a gas collection device of a printing press, which can prevent a work environment in which the printing press is installed from being deteriorated by the gas of the volatile organic compound.Type: ApplicationFiled: October 16, 2015Publication date: November 23, 2017Inventors: Koichi Ohrui, Yutaka Yuasa, Shigenori Iwabuchi
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Publication number: 20080224389Abstract: A sheet abnormality detection apparatus includes a plurality of abutting members which move upon coming into contact with at least one of sheets conveyed to overlap while being shifted from each other in a convey direction and an object attached to a sheet. The plurality of abutting members are disposed side by side in a direction perpendicular to a sheet convey direction. The apparatus also includes an abnormality detection unit which detects a sheet abnormality on the basis of a relative positional shift among the plurality of abutting members. A sheet abnormality detection method is also disclosed.Type: ApplicationFiled: March 13, 2008Publication date: September 18, 2008Inventors: Nabuaki Saito, Yutaka Yuasa, Toshihiro Kobashi, Hirofumi Saito, Ohra Sakata, Kenji Yamada, Motomi Inoue
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Patent number: 6899327Abstract: A sheet guide apparatus comprises gripper devices for holding and transporting a printed sheet, an impression cylinder and a transfer cylinder for holding and transporting the printed sheet received from the gripper device, and a first guide device for guiding the printed sheet being transported. A front end portion of the first guide device is located upstream, in the flow direction of the printed sheet, from a transfer position, where the printed sheet is transferred from the gripper device to the impression cylinder, and the front end portion of the first guide device is also located near the transfer position. Suction holes opening in a front end portion of a plate-shaped guide of the first guide device are provided for sucking air. The sheet guide apparatus suppresses fluttering or instability of the sheet.Type: GrantFiled: April 8, 2003Date of Patent: May 31, 2005Assignee: Komori CorporationInventors: You Shimizu, Shigenori Iwabuchi, Yutaka Yuasa, Koichi Ohrui
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Publication number: 20030189286Abstract: A sheet guide apparatus comprises gripper devices for holding and transporting a printed sheet, an impression cylinder and a transfer cylinder for holding and transporting the printed sheet received from the gripper device, and a first guide device for guiding the printed sheet being transported. A front end portion of the first guide device is located upstream, in the flow direction of the printed sheet, from a transfer position, where the printed sheet is transferred from the gripper device to the impression cylinder, and the front end portion of the first guide device is also located near the transfer position. Suction holes opening in a front end portion of a plate-shaped guide of the first guide device are provided for sucking air. The sheet guide apparatus suppresses fluttering or instability of the sheet.Type: ApplicationFiled: April 8, 2003Publication date: October 9, 2003Inventors: You Shimizu, Shigenori Iwabuchi, Yutaka Yuasa, Koichi Ohrui
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Patent number: 5584241Abstract: A printing switching apparatus for a sheet-fed rotary press with a reversing mechanism includes a fixed gear, a rotary gear, a fixing unit, and a proximity switch. The fixed gear is fixed to the shaft of a first cylinder. The rotary gear is coaxial with the fixed gear, coupled to be driven with a second adjacent cylinder along a paper convey direction, and phase-adjustable with respect to the fixed gear in a circumferential direction. The fixing unit fixes the rotary gear to one of the fixed gear and the shaft of the first cylinder to perform rotational transmission such that phase switching of the rotary gear between single-sided printing and perfecting printing is performed when the fixing means is released, and the rotary gear is not fixed to one of the fixed gear and the shaft of the first cylinder.Type: GrantFiled: June 7, 1995Date of Patent: December 17, 1996Assignee: Komori CorporationInventor: Yutaka Yuasa
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Patent number: 5410959Abstract: A printing switching apparatus for a sheet-fed rotary press with a reversing mechanism includes a fixed gear, a rotary gear, a first inclined surface, an engaging member, and an actuating unit. The fixed gear is fixed to a shaft of a cylinder. The rotary gear is coaxial with the fixed gear, coupled to be driven with a cylinder adjacent to the cylinder, and phase-adjustable with respect to the fixed gear in a circumferential direction. The first inclined surface is formed on the rotary gear. The engaging member is movable with respect to the fixed gear and has a second inclined surface pressed against the first inclined surface of the rotary gear. The actuating unit moves the engaging means in a direction to be separated from or come close to the fixed gear, presses or releases the first inclined surface of the rotary gear and the second inclined surface of the engaging member against or from each other, and connects or disconnects rotational transmission between the fixed gear and the rotary gear.Type: GrantFiled: July 1, 1994Date of Patent: May 2, 1995Assignee: Komori CorporationInventors: Hiroyuki Sugiyama, Yutaka Yuasa