Patents by Inventor Yuto KOSAKA

Yuto KOSAKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230094655
    Abstract: A plasma processing apparatus includes: a chamber; a substrate support provided in the chamber; a bias power supply that supplies an electrical bias energy to an electrode of the substrate support; a matching box including a matching circuit; a radio-frequency power supply that supplies a radio-frequency power having a variable frequency into the chamber through the matching box, and adjusts the frequency of the radio-frequency power in each of a plurality of phase periods within the cycle of the electrical bias energy; a sensor that detects an electrical signal reflecting a deviation of a load impedance of the radio-frequency power supply from a matching state; and a filter that generates a filtered signal by removing and an intermodulation distortion component of the radio-frequency power and the electrical bias energy from the electrical signal in each of the plurality of phase periods.
    Type: Application
    Filed: September 23, 2022
    Publication date: March 30, 2023
    Applicant: Tokyo Electron Limited
    Inventors: Chishio KOSHIMIZU, Gen TAMAMUSHI, Masahiro INOUE, Yuto KOSAKA, Shoichiro MATSUYAMA