Abstract: A processing apparatus includes a rotatable turntable and four chuck tables disposed on the turntable. When the turntable with the four chuck tables disposed thereon is intermittently turned about its central axis, the wafer held on each of the chuck tables is moved to and positioned in a first processing position, a second processing position, and a third processing position where the wafer is processed. Three types of processing processes are able to be carried out on the wafers without the wafers being spaced from holding surfaces of the chuck tables.

Abstract: A polishing surface dressing method includes: a dressing step of dressing a polishing surface; a polishing surface shape measuring step of measuring the shape of the polishing surface based on a displacement amount in a first direction orthogonal to the polishing surface and a movement position in the second direction of the dressing section that is in contact with the polishing surface; a determination step of determining appropriateness of the shape of the polishing surface measured in the polishing surface shape measuring step; and a condition change step of changing a contact condition in which the dressing section makes contact with the polishing surface in the dressing step, when the shape of the polishing surface is determined to be “No Good”, and the dressing step is performed again based on the contact condition changed in the condition change step.

Abstract: An X-ray phase imaging apparatus includes an X-ray source; a detector; a plurality of gratings; an image processor configured to generate two or more types of first phase contrast images selected from absorption, differential phase and dark-field images as preview images under an imaging condition simpler than an imaging condition for a second phase contrast image to be captured in actual imaging; and a controller configured to display the first phase contrast images on a display.

Abstract: An X-ray phase imaging apparatus includes an X-ray source; a detector; a plurality of gratings; a rotation mechanism; an image processor configured to generate a phase contrast image and to generate a preview image prior to capture of the phase contrast image; and a controller configured to control function of displaying on a display the preview image, and function of discriminatively displaying on the display an image coverage area for the phase contrast image that is associated with a relative rotation angle between the plurality of gratings and a subject.

Abstract: There is provided a conveying apparatus having a holding surface that holds a held surface of a substrate to convey the substrate. The conveying apparatus includes a holding pad that gets contact with an outer circumferential part of the held surface of the substrate or a side surface of the substrate and forms a space to be filled with water between the held surface of the substrate and the holding surface, a movement unit that causes the holding pad to move in such a direction as to get closer to or further away from the held surface, a water supply unit that supplies the water to the space, and a suction unit that sucks the water with which the space is filled and improves a force of holding the substrate. The conveying apparatus holds the substrate by the holding pad and conveys the substrate with the interposition of the water.

Abstract: An X-ray phase imaging apparatus includes a control device configured or programmed to make a notification prompting a user to update or generate a corresponding second X-ray image when determining that a decrease in an image quality of an X-ray phase contrast image generated based on a first X-ray image obtained by imaging a subject and a second X-ray image obtained by imaging without the subject arranged does not fall within a predetermined allowable range and/or determining that the second X-ray image associated with an imaging condition has not been stored.

Abstract: This X-ray phase imaging system includes a plurality of gratings including a first grating that is irradiated with X-rays from an X-ray source and a second grating that is irradiated with X-rays from the first grating. The X-ray phase imaging system includes an imaging unit that optically images a subject and one or both of the first grating and the second grating.

Abstract: A processing apparatus includes a rotatable turntable and four chuck tables disposed on the turntable. When the turntable with the four chuck tables disposed thereon is intermittently turned about its central axis, the wafer held on each of the chuck tables is moved to and positioned in a first processing position, a second processing position, and a third processing position where the wafer is processed. Three types of processing processes are able to be carried out on the wafers without the wafers being spaced from holding surfaces of the chuck tables.

Abstract: An X-ray phase imaging apparatus includes an X-ray source; a detector; a plurality of gratings; an image processor configured to generate two or more types of first phase contrast images selected from absorption, differential phase and dark-field images as preview images under an imaging condition simpler than an imaging condition for a second phase contrast image to be captured in actual imaging; and a controller configured to display the first phase contrast images on a display.

Abstract: An X-ray phase imaging apparatus includes an X-ray source; a detector; a plurality of gratings; a rotation mechanism; an image processor configured to generate a phase contrast image and to generate a preview image prior to capture of the phase contrast image; and a controller configured to control function of displaying on a display the preview image, and function of discriminatively displaying on the display an image coverage area for the phase contrast image that is associated with a relative rotation angle between the plurality of gratings and a subject.

Abstract: An X-ray phase imaging apparatus includes a control device configured or programmed to make a notification prompting a user to update or generate a corresponding second X-ray image when determining that a decrease in an image quality of an X-ray phase contrast image generated based on a first X-ray image obtained by imaging a subject and a second X-ray image obtained by imaging without the subject arranged does not fall within a predetermined allowable range and/or determining that the second X-ray image associated with an imaging condition has not been stored.

Abstract: There is provided a grinding apparatus used at the time of grinding a workpiece. The grinding apparatus includes a chuck table that has a holding surface for holding the workpiece, a grinding unit that has a spindle to which a grinding wheel in which a plurality of grindstones are arrayed in an annular shape is mounted, and an exterior cover that includes an opening facing the grinding unit and a door capable of covering the opening and that covers both the chuck table and the grinding unit. In the grinding apparatus, on an inner surface of the door that faces the grinding unit in a closed state in which the opening is covered by the door, a work bench that is folded to prevent interference with the grinding unit in the closed state is provided.

Abstract: This X-ray phase imaging system includes a plurality of gratings including a first grating that is irradiated with X-rays from an X-ray source and a second grating that is irradiated with X-rays from the first grating. The X-ray phase imaging system includes an imaging unit that optically images a subject and one or both of the first grating and the second grating.

Abstract: A grinding wheel jig includes a bottomed cylindrical grindstone accommodating section that accommodates the annular grindstone section, an annular base accommodating section that is located on a side opposite to a bottom portion of the grindstone accommodating section in a height direction of the grindstone accommodating section, has an outside diameter greater than an outside diameter of the grindstone accommodating section, and is capable of accommodating at least a part of the base, and a plurality of cylindrical bolt accommodating sections provided at bottom portions of the base accommodating sections and each capable of accommodating a head part of a bolt. In the grinding wheel jig, each bolt accommodating section is provided, at a bottom portion thereof, with an opening in which a fastening tool is insertable into the head part of the bolt.

Abstract: There is provided a conveying apparatus having a holding surface that holds a held surface of a substrate to convey the substrate. The conveying apparatus includes a holding pad that gets contact with an outer circumferential part of the held surface of the substrate or a side surface of the substrate and forms a space to be filled with water between the held surface of the substrate and the holding surface, a movement unit that causes the holding pad to move in such a direction as to get closer to or further away from the held surface, a water supply unit that supplies the water to the space, and a suction unit that sucks the water with which the space is filled and improves a force of holding the substrate. The conveying apparatus holds the substrate by the holding pad and conveys the substrate with the interposition of the water.