Patents by Inventor Yuto USUKI

Yuto USUKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Execution device and execution method
    Patent number: 11933826
    Abstract: An execution device according to an exemplary embodiment includes an operation device, an acceleration sensor, and an arithmetic device. The operation device is a device for executing a predetermined operation. The acceleration sensor measures acceleration applied to the execution device. The arithmetic device measures an elapsed time after the acceleration measured by the acceleration sensor becomes a value within a reference range, and when a predetermined time elapses while the acceleration remains a value within the reference range, causes the operation device to execute the predetermined operation.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: March 19, 2024
    Assignee: Tokyo Electron Limited
    Inventors: Yuto Usuki, Takayuki Hatanaka
  • CALIBRATION APPARATUS AND CALIBRATION METHOD
    Publication number: 20220341844
    Abstract: A calibration apparatus for calibrating an emission spectroscopy analyzer that monitors plasma generated in a plasma processing apparatus. The calibration apparatus comprises a base substrate; a plurality of light emitting devices disposed on the base substrate, each light emitting device of the plurality of light emitting devices is configured to emit light having different wavelengths from other light emitting devices of the plurality of light emitting devices; a reflector disposed on the base substrate, the reflector configured to reflect the light emitted by the plurality of light emitting devices toward an outside of the base substrate in a plan view; and a control device disposed on the base substrate, the control device configured to control the plurality of light emitting devices.
    Type: Application
    Filed: April 26, 2022
    Publication date: October 27, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Yuto USUKI, Kippei SUGITA, Mitsuru DOHIWA, Takashi NIINUMA, Hisanori SAKAI
  • EXECUTION DEVICE AND EXECUTION METHOD
    Publication number: 20220074981
    Abstract: An execution device according to an exemplary embodiment includes an operation device, an acceleration sensor, and an arithmetic device. The operation device is a device for executing a predetermined operation. The acceleration sensor measures acceleration applied to the execution device. The arithmetic device measures an elapsed time after the acceleration measured by the acceleration sensor becomes a value within a reference range, and when a predetermined time elapses while the acceleration remains a value within the reference range, causes the operation device to execute the predetermined operation.
    Type: Application
    Filed: September 8, 2021
    Publication date: March 10, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Yuto USUKI, Takayuki HATANAKA