Patents by Inventor Yuugo Tai

Yuugo Tai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing pad
    Patent number: 8128464
    Abstract: A chemical mechanical polishing pad used for chemical mechanical polishing comprises a polishing surface, a non-polishing surface that is provided opposite to the polishing surface, a side surface that connects an outer edge of the polishing surface and an outer edge of the non-polishing surface, and a plurality of grooves formed in the polishing surface. The side surface has a slope surface that is connected to the polishing surface, and a depth of the grooves is equal to or smaller than a height of the slope surface.
    Type: Grant
    Filed: January 28, 2009
    Date of Patent: March 6, 2012
    Assignee: JSR Corporation
    Inventors: Masayuki Motonari, Tomikazu Ueno, Masahiro Yamamoto, Yuugo Tai, Hiroyuki Miyauchi
  • CHEMICAL MECHANICAL POLISHING PAD
    Publication number: 20090209185
    Abstract: A chemical mechanical polishing pad used for chemical mechanical polishing comprises a polishing surface, a non-polishing surface that is provided opposite to the polishing surface, a side surface that connects an outer edge of the polishing surface and an outer edge of the non-polishing surface, and a plurality of grooves formed in the polishing surface. The side surface has a slope surface that is connected to the polishing surface, and a depth of the grooves is equal to or smaller than a height of the slope surface.
    Type: Application
    Filed: January 28, 2009
    Publication date: August 20, 2009
    Applicant: JSR CORPORATION
    Inventors: Masayuki Motonari, Tomikazu Ueno, Masahiro Yamamoto, Yuugo Tai, Hiroyuki Miyauchi