Abstract: Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24?) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20).

Abstract: In order to provide an optical measurement system and an optical measurement method which is suitable for optically measuring a body to be inspected and easily obtaining an image of a desired item based on information obtained by the measurement, an optical measurement method including an initial display process for selectively instructing any one of selection of optical measurement, analysis of said optical measurement result and completion of a program; a process for inputting items of condition including a measurement mode; a process for displaying a light irradiation position and a light detection position and a state expressing measurement position relationship together with said mode; a process for instructing to form a file for storing said optical measurement result; a process for instructing a measurement condition to detect light signals from the inside of a body to be inspected which is irradiated by a multi-wavelength multi-channel; and a process for displaying said signals for each channel detect

Abstract: In order to provide an optical measurement system and an optical measurement method which is suitable for optically measuring a body to be inspected and easily obtaining an image of a desired item based on information obtained by the measurement, an optical measurement method comprising an initial display process for selectively instructing any one of selection of optical measurement, analysis of said optical measurement result and completion of a program (S1); a process for inputting items of condition including a measurement mode (S2); a process for displaying a light irradiation position and a light detection position and a state expressing measurement position relationship together with said mode (S4); a process for instructing to form a file for storing said optical measurement result; a process for instructing a measurement condition to detect light signals from the inside of a body to be inspected which is irradiated by a multi-wavelength multi-channel (S10); and a process for displaying said signals f

Abstract: An optical measurement system for optically measuring a body to be inspected and obtaining an image of a desired item based on information obtained by the measurement includes means for displaying a number of measurement points, means for indicating a light irradiation position and a light detecting position and means for displaying a measurement position and a state of allocating a number to the measurement position. The system further includes means for displaying measuring time sequence data, means for setting a condition of acquiring data, means for displaying a status of acquiring the data, means for instructing control of measurement and means for marking a mark at a position measuring time sequence data.

Abstract: Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24′) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20).