Abstract: The present invention proposes a mark for position detection which can reliably detect a mark which is the subject of detection, even when a large number of marks of the same type are present in the vicinity of this mark which is to be the subject of detection. A mark for position detection 10, which is provided upon a photosensitive substrate P, and which is used when detecting positional information for the photosensitive substrate P by an alignment optical system 9, comprises an alignment mark 1 for outputting positional information to a control device CONT by being observed by the alignment optical system 9, and a identification mark 2 which is arranged in a predetermined positional relationship with the alignment mark 1, consists of a combination of four patterns of three types, and expresses 34 types of information.

Abstract: The imaging signal (the raw waveform) and the modified waveform are obtained, wherein the raw waveform is obtained from the image of the mark which is picked-up by the image pick-up device, and the modified waveform is obtained through the modification of the imaging signal by the waveform modifying unit. By using respective raw wave form and modified waveform, the mark information calculating unit obtains the mark information for the mark position such as estimated mark position and so forth. Then, the position calculating unit detects the positional information of the mark based on the plural mark information in the obtained mark information. As a result, the mark position might be precisely detected depending on the figure of the noise signal.

Abstract: A degree-of-randomness calculation unit calculates the degrees of randomness of data values in the respective data sets as division results, on feature amount data at feature points of the signal waveforms obtained when an image pick-up unit picks up images of marks, while changing the data division form, in the respective data division forms, and calculates the sum of the degrees of randomness. A classification calculation unit classifies the feature points in the data division form in which the sum of degrees of randomness is minimized, thereby classifying the feature amount data into signal data and noise data. A position calculation unit calculates mark position information on the basis of the position of the feature point determined as signal data by S/N discrimination with reference to such degrees of randomness. As a consequence, the position information of each mark formed on the object is accurately detected.

Abstract: The imaging signal (the raw waveform) and the modified waveform are obtained, wherein the raw waveform is obtained from the image of the mark which is picked-up by the image pick-up device, and the modified waveform is obtained through the modification of the imaging signal by the waveform modifying unit. By using respective raw wave form and modified waveform, the mark information calculating unit obtains the mark information for the mark position such as estimated mark position and so forth. Then, the position calculating unit detects the positional information of the mark based on the plural mark information in the obtained mark information. As a result, the mark position might be precisely detected depending on the figure of the noise signal.