Patents by Inventor Yuuji Yada

Yuuji Yada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Structure of reflux fan for excimer laser apparatus
    Publication number: 20020044588
    Abstract: First and second radial magnetic bearings are provided at opposing ends of a rotary shaft, first and second protective bearings are arranged in the vicinity thereof, a third radial magnetic bearing is arranged on a side of a fan near a motor, and by the third radial magnetic bearing, negative spring element of the motor is corrected.
    Type: Application
    Filed: September 19, 2001
    Publication date: April 18, 2002
    Inventors: Takayoshi Ozaki, Yuuji Yada, Hironori Tokunaga, Koji Yamada