Patents by Inventor Yuuki Ojima

Yuuki Ojima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron microscope with measurement function
    Publication number: 20080109755
    Abstract: A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
    Type: Application
    Filed: December 10, 2007
    Publication date: May 8, 2008
    Inventors: Yuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto
  • Scanning electron microscope with measurement function
    Publication number: 20060219917
    Abstract: A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
    Type: Application
    Filed: April 6, 2006
    Publication date: October 5, 2006
    Inventors: Yuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto
  • Scanning electron microscope with measurement function
    Patent number: 7053371
    Abstract: A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
    Type: Grant
    Filed: February 18, 2004
    Date of Patent: May 30, 2006
    Assignees: Hitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.
    Inventors: Yuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto
  • Scanning electron microscope with measurement function
    Publication number: 20040164245
    Abstract: A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
    Type: Application
    Filed: February 18, 2004
    Publication date: August 26, 2004
    Inventors: Yuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto