Abstract: A shower plate includes a base, a resistance heating element, a channel, and a hollow portion. The base is made of ceramic and has a plate shape. The resistance heating element is located inside the base along a first surface of the base. The channel is located inside the base and includes an intermediate channel that is located between the resistance heating element and a second surface on a side opposite to the first surface of the base and extends in a planar direction of the base. The hollow portion is located adjacent to the intermediate channel in the planar direction of the base inside the base.

Abstract: A heater includes an insulating base, a resistance heating element, and a hollow member. The base includes an upper surface and a lower surface. The resistance heating element extends inside the base along the upper surface and the lower surface. The hollow member includes a first plate-shaped part laid over the lower surface, a second plate-shaped part facing the first plate-shaped part through a space, and a side surface part surrounding the space from an outside in a planar direction of the first plate-shaped part and the second plate-shaped part.

Abstract: A base structure includes a base, a first conductor layer, and a via conductor. The base has a first surface. The first conductor layer is positioned along the first surface in the base. The via conductor includes a first part and a second part in a section that includes the via conductor and that extends in a first direction perpendicular to the first surface. The length of the first part in the first direction is larger than the thickness of the first conductor layer. The length of the second part in the first direction is larger than the thickness of the first conductor layer. The second part is continuous with the first part, and at least a portion of the outer edge of the second part is displaced from the outer edge of the first part when viewed in the first direction.

Abstract: A heater includes a base body and an internal conductor. The base body is made of ceramic. The internal conductor is located inside the base body and includes a connection portion. The base body includes a space extending from the connection portion to a lower surface of the base body. The space includes a first space and a second space. The first space contacts with the connection portion. The second space connects the first space and an outer side of the lower surface of the base body, and is smaller than the first space in a planar perspective of the lower surface of the base body.

Abstract: A heater includes a base body and a resistance heating element. The base body is configured by an insulating material and includes a top surface on which a wafer is placed. The resistance heating element extends in the base body along the top surface. A top surface of the resistance heating element and the base body are in contact with each other. A vacuum or gas-filled gap is interposed between a side surface of the resistance heating element and the base body.

Abstract: A heater includes an insulating base, a resistance heating element, and a hollow member. The base includes an upper surface and a lower surface. The resistance heating element extends inside the base along the upper surface and the lower surface. The hollow member includes a first plate-shaped part laid over the lower surface, a second plate-shaped part facing the first plate-shaped part through a space, and a side surface part surrounding the space from an outside in a planar direction of the first plate-shaped part and the second plate-shaped part.

Abstract: A heat exchange member includes: a lid portion; a bottom plate portion; a plurality of partition portions disposed so as to connect the lid portion and the bottom plate portion, a part surrounded by the lid portion, the bottom plate portion and the partition portion defining a first flow passage through which a first fluid flows; a curved portion curved toward the first flow passage on a first flow passage side of at least one of the lid portion and the bottom plate portion when viewed in a cross section perpendicular to a direction in which the first fluid flows.

Abstract: In the present disclosure, a flow path member includes a substrate, a flow path and a first oxide layer. The substrate contains non-oxide ceramics, and includes an outer surface. The flow path is in the substrate, and includes an inlet and an outlet. The first oxide layer is disposed on the outer surface.

Abstract: A flow path member includes a lid portion, a bottom plate portion, and side walls provided between the lid portion and the bottom plate portion, a flow path in which a fluid flows is configured with the lid portion, the side walls, and the bottom plate portion, a portion of a surface of the side walls on the flow path side includes a coarse portion that is coarser than the other portions.

Abstract: A flow path member may include silicon nitride ceramics. The flow path member may have an inlet port, an outlet port, and a flow path connected to the inlet port and the outlet port inside the flow path member. A plurality of needle-shaped crystals may be arranged on a surface of the flow path where the needle-shaped crystals intersect each other.

Abstract: The sample conveying member of the present disclosure includes: a ceramic substrate; a support part that includes a conductive member on at least a portion of a sample support surface; and a conductive layer that is positioned inside of the substrate and connects to a grounding unit outside of the substrate from the conductive member.

Abstract: A flow passage member includes a wall formed of ceramics, a space surrounded by the wall being a flow passage through which a fluid flows, a ratio of an area occupied by a grain boundary phase in an inner surface of a wall part of the wall in which wall part heat exchange is conducted being smaller than a ratio of an area occupied by a grain boundary phase in an outer surface of the wall part.

Abstract: In the present disclosure, a flow path member includes a substrate, a flow path and a first oxide layer. The substrate contains non-oxide ceramics, and includes an outer surface. The flow path is in the substrate, and includes an inlet and an outlet. The first oxide layer is disposed on the outer surface.

Abstract: A flow path member may include silicon nitride ceramics. The flow path member may have an inlet port, an outlet port, and a flow path connected to the inlet port and the outlet port inside the flow path member. A plurality of needle-shaped crystals may be arranged on a surface of the flow path where the needle-shaped crystals intersect each other.

Abstract: A flow path member includes a flow path which has an inlet and an outlet in a base made of ceramics, and a low resistance portion whose surface resistance is less than 1×107 ?/sq in at least a part of the flow path.

Abstract: A flow channel member according to the present invention includes a ceramic substrate, a flow channel inside the ceramic substrate through which a fluid flows, and multiple protrusions on an outer surface of the substrate.

Abstract: The heat exchanger is provided with: a plurality of first members including walls that have introduction holes on a first end side and discharge holes on a second end side, with spaces connecting the introduction holes and the discharge holes serving as first channels through which fluid flows; second members that communicate with the introduction holes at the first end side of the plurality of first members to introduce the first fluid to the first members; and third members that communicate with the discharge holes at the second end side of the plurality of first members to discharge the first fluid that has flowed through the first members. In at least one adjacent pair of the introduction holes, regions that overlap with opening regions of the upstream-side introduction holes exist in the walls including the downstream-side introduction holes, when viewed in a direction in which the first fluid flows.

Abstract: [Object] Provided are a flow channel member having high heat-exchange efficiency in addition to high corrosion resistance and high mechanical characteristics, a heat exchanger including the flow channel member, and a semiconductor module including the flow channel member. [Solution] A flow channel member 10 according to the present invention includes a ceramic substrate 1, a flow channel 3 inside the ceramic substrate 1 through which a fluid flows, and multiple protrusions 2 on an outer surface of the substrate 1. The flow channel member 10 according to the present invention having such a configuration has high heat-exchange efficiency in addition to high corrosion resistance and high mechanical characteristics.

Abstract: A flow passage member includes a wall formed of ceramics, a space surrounded by the wall being a flow passage through which a fluid flows, a ratio of an area occupied by a grain boundary phase in an inner surface of a wall part of the wall in which wall part heat exchange is conducted being smaller than a ratio of an area occupied by a grain boundary phase in an outer surface of the wall part.

Abstract: A heat exchange member includes: a lid portion; a bottom plate portion; a plurality of partition portions disposed so as to connect the lid portion and the bottom plate portion, a part surrounded by the lid portion, the bottom plate portion and the partition portion defining a first flow passage through which a first fluid flows; a curved portion curved toward the first flow passage on a first flow passage side of at least one of the lid portion and the bottom plate portion when viewed in a cross section perpendicular to a direction in which the first fluid flows.