Patents by Inventor Yuusaku SAKKA

Yuusaku SAKKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing apparatus and operating method of vacuum processing apparatus
    Patent number: 11600472
    Abstract: There is provided a vacuum processing apparatus in which at least one of the processing units includes a lower member and an upper member mounted on the lower member to be attachable and detachable that configure the vacuum container, a turning shaft member which is attached to an outer circumferential part of the base plate between the work space and the vacuum container, and has a turning shaft that moves from above the base plate when the turning shaft is connected to the lower member and the lower member turns around the connected part, and a maintenance member including an arm which is disposed above the turning shaft member and turns in a horizontal direction as the upper member is suspended, and in which the lower member is configured to be fixable at the position at a predetermined angle within a range of an angle at which the lower member is capable of turning around the shaft, and to be vertically movable as the arm of the maintenance member fixes the position above a center portion of the lower mem
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: March 7, 2023
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Ryoichi Isomura, Yuusaku Sakka, Kouhei Satou, Takashi Uemura, Satoshi Yamamoto, Hiromichi Kawasaki
  • VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSING APPARATUS
    Publication number: 20190157053
    Abstract: There is provided a vacuum processing apparatus in which at least one of the processing units includes a lower member and an upper member mounted on the lower member to be attachable and detachable that configure the vacuum container, a turning shaft member which is attached to an outer circumferential part of the base plate between the work space and the vacuum container, and has a turning shaft that moves from above the base plate when the turning shaft is connected to the lower member and the lower member turns around the connected part, and a maintenance member including an arm which is disposed above the turning shaft member and turns in a horizontal direction as the upper member is suspended, and in which the lower member is configured to be fixable at the position at a predetermined angle within a range of an angle at which the lower member is capable of turning around the shaft, and to be vertically movable as the arm of the maintenance member fixes the position above a center portion of the lower mem
    Type: Application
    Filed: February 22, 2018
    Publication date: May 23, 2019
    Inventors: Ryoichi ISOMURA, Yuusaku SAKKA, Kouhei SATOU, Takashi UEMURA, Satoshi YAMAMOTO, Hiromichi KAWASAKI