Patents by Inventor YUUYA INOMATA

YUUYA INOMATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONTROL APPARATUS, ADJUSTING METHOD THEREOF, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
    Publication number: 20230176548
    Abstract: A control apparatus which generates control signal for controlling a control object, includes a first compensator configured to generate a first signal based on a control deviation of the control object, a corrector configured to generate a correction signal by correcting the control deviation in accordance with an arithmetic expression having an adjustable coefficient, a second compensator configured to generate a second signal by a neural network based on the correction signal, and an arithmetic device configured to generate the control signal based on the first signal and the second signal.
    Type: Application
    Filed: February 1, 2023
    Publication date: June 8, 2023
    Inventors: HIROKAZU KUSAYANAGI, TOMOYASU HATA, YUUYA INOMATA, YASUNOBU ASAKURA, TAKUMI HASHIMOTO, HIROSHI MORIKAWA, MASAHIRO ITO, YUJI ISHII