Patents by Inventor Yuval Lubashevksy

Yuval Lubashevksy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • On-the-fly scatterometry overlay metrology target
    Patent number: 11378394
    Abstract: A metrology target is disclosed, in accordance with one or more embodiments of the present disclosure. The metrology target includes a first set of pattern elements having a first pitch, where the first set of pattern elements includes segmented pattern elements. The metrology target includes a second set of pattern elements having a second pitch, where the second set of pattern elements includes segmented pattern elements. The metrology target includes a third set of pattern elements having a third pitch, where the third set of pattern elements includes segmented pattern elements.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: July 5, 2022
    Assignee: KLA Corporation
    Inventors: Yuri Paskover, Itay Gdor, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman, Yoram Uziel
  • ON-THE-FLY SCATTEROMETRY OVERLAY METROLOGY TARGET
    Publication number: 20220187062
    Abstract: A metrology target is disclosed, in accordance with one or more embodiments of the present disclosure. The metrology target includes a first set of pattern elements having a first pitch, where the first set of pattern elements includes segmented pattern elements. The metrology target includes a second set of pattern elements having a second pitch, where the second set of pattern elements includes segmented pattern elements. The metrology target includes a third set of pattern elements having a third pitch, where the third set of pattern elements includes segmented pattern elements.
    Type: Application
    Filed: December 11, 2020
    Publication date: June 16, 2022
    Applicant: KLA Corporation
    Inventors: Yuri Paskover, Itay Gdor, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman, Yoram Uziel