Patents by Inventor Yuval Weissler

Yuval Weissler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DARK FIELD ILLUMINATION BASED ON LASER ILLUMINATED PHOSPHOR
    Publication number: 20230251198
    Abstract: An illumination module may include a laser diode array configured to emit laser radiation; a phosphor illumination unit that is configured to emit phosphor radiation following an exposure to the laser radiation; a multiple-angle illumination unit; and intermediate optics that is configured to convey the phosphor radiation to the multiple-angle illumination unit. The multiple-angle illumination unit is configured to receive the phosphor radiation and to dark field illuminate a region of a sample wafer from multiple angles during inspection of the wafer.
    Type: Application
    Filed: April 20, 2023
    Publication date: August 10, 2023
    Applicant: CAMTEK Ltd.
    Inventors: Amnon Menachem, Yuval Weissler, Zehava Ben Ezer