Patents by Inventor Yuya MIZOKAMI

Yuya MIZOKAMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND FILM FORMING APPARATUS
    Publication number: 20240321551
    Abstract: Provided are a semiconductor device manufacturing method and a film forming apparatus that are capable of improving coverage in a film formation process while suppressing a decrease in productivity. The semiconductor device manufacturing method includes a film formation process of forming a film on a side toward one surface of a substrate disposed in a chamber by using a plasma CVD method. The film formation process changes plasma density in the chamber according to a preset waveform while forming the film.
    Type: Application
    Filed: February 14, 2022
    Publication date: September 26, 2024
    Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Kiyotaka TABUCHI, Kazunori NAGAHATA, Yuji MIYATA, Yuya MIZOKAMI, Masaharu SHIRATANI, Kunihiro KAMATAKI