Abstract: A substrate storing container includes: a container main body; a lid body that is attachable to and detachable from a container main body opening portion and can close the container main body opening portion; and a sealing member that closes the container main body opening portion together with the lid body, in which airtightness of the substrate storing space is enhanced so that 50% or more of a gas supplied to a substrate storing space can be discharged from an exhaust filter portion in a case in which a supply amount of a gas supplied from an outer space of the container main body to the substrate storing space through a gas supply filter portion is 22 liters per minute or less.

Abstract: A substrate storing container includes a filter unit having a housing that forms a ventilation path and a filter. The housing includes an outer housing portion and an inner housing portion at least partially disposed inside the outer housing portion and fastened to the outer housing portion. The inner housing portion has a male thread portion at a part disposed inside the outer housing portion. The outer housing portion has a female thread portion that meshes with the male thread portion. The inner housing portion has first engagement portions at a part that is disposed inside the outer housing portion and where the male thread portion does not exist. The outer housing portion has second engagement portions that engage with the first engagement portions at a part where the female thread portion does not exist. The first engagement portions and the second engagement portions are configured to be visually identifiable.

Abstract: A housing accommodates: a valve body capable of moving between a closing position and an opening position in an outer opening portion, the closing position closing the outer opening portion and the opening position opening the outer opening portion; a biased member having a tubular shape and connected to the valve body, the biased member supported by the housing so as to be movable in the housing and guiding the movement of the valve body so as to move integrally with the valve body; and a biasing member biasing the biased member so that the valve body moves to the closing position.

Abstract: A substrate storing container 1 includes a filter unit 90 having a housing that forms a ventilation path 901 and a filter 95. The housing includes an outer housing portion 94 and an inner housing portion 92 at least partially disposed inside the outer housing portion 94 and fastened to the outer housing portion 94. The inner housing portion 92 has a male thread portion 929 at a part disposed inside the outer housing portion 94. The outer housing portion 94 has a female thread portion 949 that meshes with the male thread portion 929. The inner housing portion 92 has first engagement portions 928 at a part that is disposed inside the outer housing portion 94 and where the male thread portion 929 does not exist. The outer housing portion has second engagement portions 948 that engage with the first engagement portions 928 at a part where the female thread portion 949 does not exist.

Abstract: A sealing member of this substrate housing container has: a base part-side deformation part that couples the base part and the container contact tip part and is elastically deformable to allow the container contact tip part to oscillate relative to the base part; and a protruding part that is present in the portion of the container contact tip part connected to the base part-side deformation part and that protrudes from the outer surface of the container contact tip part. The thickness of the container contact tip part in the oscillating direction of the container contact tip part is configured to be greater than the thickness of the base part-side deformation part.

Abstract: A substrate storing container includes: a container main body; a lid body that is attachable to and detachable from a container main body opening portion and can close the container main body opening portion; and a sealing member that closes the container main body opening portion together with the lid body, in which airtightness of the substrate storing space is enhanced so that 50% or more of a gas supplied to a substrate storing space can be discharged from an exhaust filter portion in a case in which a supply amount of a gas supplied from an outer space of the container main body to the substrate storing space through a gas supply filter portion is 22 liters per minute or less.

Abstract: A sealing member of this substrate housing container has: a base part-side deformation part that couples the base part and the container contact tip part and is elastically deformable to allow the container contact tip part to oscillate relative to the base part; and a protruding part that is present in the portion of the container contact tip part connected to the base part-side deformation part and that protrudes from the outer surface of the container contact tip part. The thickness of the container contact tip part in the oscillating direction of the container contact tip part is configured to be greater than the thickness of the base part-side deformation part.