Patents by Inventor Yuya SASAKI
Yuya SASAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240094622Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light. The phase shift film contains Ir as a main component. A ratio of a maximum value of an intensity of a peak of diffracted light from the phase shift film in a 2? range of 35° to 45° to an average value of an intensity of the diffracted light in a 2? range of 55° to 60° measured using an XRD method with a CuK? ray, upon being irradiated with the EUV light with an incident angle of ?, is 1.0 or more and 30 or less. A refractive index and an extinction coefficient of the phase shift film to the EUV light are 0.925 or less, and 0.030 or more, respectively.Type: ApplicationFiled: November 22, 2023Publication date: March 21, 2024Applicant: AGC Inc.Inventors: YUYA NAGATA, Daijiro Akagi, Kenichi Sasaki, Hiroaki Iwaoka
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Patent number: 11935750Abstract: A method for producing a semiconductor device includes forming, on a substrate, a film to be processed. The method further includes forming, on the film to be processed, a first film containing a metallic element and a second film containing at least one of carbon or boron. The method further includes forming an insulating film on the first and second films. The method further includes processing the film to be processed using the first film, the second film, and the insulating film, as a mask.Type: GrantFiled: February 25, 2021Date of Patent: March 19, 2024Assignee: KIOXIA CORPORATIONInventors: Kei Watanabe, Toshiyuki Sasaki, Soichi Yamazaki, Shunsuke Ochiai, Yuya Matsubara
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Patent number: 11926853Abstract: Provided is a botulinum toxin producing method which is simple achieves a high toxin yield, and obtains a toxin having high specific activity. This botulinum toxin producing method includes: (A) a step in which a botulinum toxin is produced from botulinum toxin-producing bacteria in a medium, and a mixture a is obtained which contains a botulinum toxin, a bacterial component, and a nucleic acid component derived from the botulinum toxin; (B) a step in which the mixture a is subjected to the removal of the bacterial component, and a mixture b is obtained which contains a nucleic acid component and a botulinum toxin; (C) a step in which an endonuclease is added to the mixture b and a mixture c is obtained which contains a nucleic acid degradation product and a botulinum toxin; and (D) a step in which the mixture c is subjected to removal of the nucleic acid degradation product, and an isolated botulinum toxin liquid d is obtained.Type: GrantFiled: December 17, 2019Date of Patent: March 12, 2024Assignee: The Research Foundation For Microbial Diseases of Osaka UniversityInventors: Daisuke Yokouchi, Akiko Miura, Ryu Okada, Yuzo Yamashita, Yuya Sasaki, Shogo Nishihata
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Patent number: 11626334Abstract: A sealing structure including: a set of base members forming a sealed space; a through-hole which is formed in at least one of the base members, and communicates with the sealed space; and a sealing member that seals the through-hole. An underlying metal film including a bulk-like metal such as gold is provided on a surface of the base member provided with the through-hole. The sealing member seals the through-hole while being bonded to the underlying metal film, and includes: a sealing material which is bonded to the underlying metal film, and includes a compressed product of a metal powder of gold or the like, the metal powder having a purity of 99.9% by mass or more; and a lid-like metal film which is bonded to the sealing material, and includes a bulk-like metal such as gold. Further, the sealing material includes: an outer periphery-side densified region being in contact with an underlying metal film; and a center-side porous region being in contact with the through-hole.Type: GrantFiled: April 6, 2017Date of Patent: April 11, 2023Assignee: TANAKA KIKINZOKU KOGYO K.K.Inventors: Toshinori Ogashiwa, Yuya Sasaki, Masayuki Miyairi
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Publication number: 20220102228Abstract: A sealing structure including: a set of base members forming a sealed space; a through-hole which is formed in at least one of the base members, and communicates with the sealed space; and a sealing member that seals the through-hole. An underlying metal film including a bulk-like metal such as gold is provided on a surface of the base member provided with the through-hole. The sealing member seals the through-hole while being bonded to the underlying metal film, and includes: a sealing material which is bonded to the underlying metal film, and includes a compressed product of a metal powder of gold or the like, the metal powder having a purity of 99.9% by mass or more; and a lid-like metal film which is bonded to the sealing material, and includes a bulk-like metal such as gold. Further, the sealing material includes: an outer periphery-side densified region being in contact with an underlying metal film; and a center-side porous region being in contact with the through-hole.Type: ApplicationFiled: April 6, 2017Publication date: March 31, 2022Inventors: Toshinori OGASHIWA, Yuya SASAKI, Masayuki MIYAIRI
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Publication number: 20220081682Abstract: Provided is a botulinum toxin producing method which is simple achieves a high toxin yield, and obtains a toxin having high specific activity. This botulinum toxin producing method includes: (A) a step in which a botulinum toxin is produced from botulinum toxin-producing bacteria in a medium, and a mixture a is obtained which contains a botulinum toxin, a bacterial component, and a nucleic acid component derived from the botulinum toxin; (B) a step in which the mixture a is subjected to the removal of the bacterial component, and a mixture b is obtained which contains a nucleic acid component and a botulinum toxin; (C) a step in which an endonuclease is added to the mixture b and a mixture c is obtained which contains a nucleic acid degradation product and a botulinum toxin; and (D) a step in which the mixture c is subjected to removal of the nucleic acid degradation product, and an isolated botulinum toxin liquid d is obtained.Type: ApplicationFiled: December 17, 2019Publication date: March 17, 2022Inventors: Daisuke Yokouchi, Akiko Miura, Ryu Okada, Yuzo Yamashita, Yuya Sasaki, Shogo Nishihata
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Patent number: 10870151Abstract: A sealing structure with a surface of a base material with a through-hole, an underlying metal film, and a sealing member bonded to the underlying metal film to seal the through-hole. The sealing member includes a compressed product of a metal powder including gold having a purity of 99.9% by mass or more and a lid-like metal film including a bulk-like metal including gold and having a thickness of not less than 0.01 ?m and not more than 5 ?m. The sealing material includes an outer periphery-side densified region in contact with an underlying metal film and a center-side porous region in contact with the through-hole. The shape of pores in the densified region is specified, and the horizontal length (l) of a pore in the radial direction at any cross-section of the densified region and the width (W) of the densified region satisfy the relationship of l?0.1W.Type: GrantFiled: April 4, 2018Date of Patent: December 22, 2020Assignee: TANAKA KIKINZOKU KOGYO K.K.Inventors: Toshinori Ogashiwa, Yuya Sasaki, Masayuki Miyairi, Kenichi Inoue
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Patent number: 10763147Abstract: A substrate warpage detection device for detecting warpage of a substrate loaded on a substrate loading region having a recess shape formed on a rotary table along a circumferential direction during rotation of the rotary table, includes a light transmitting part configured to transmit a light beam obliquely upward from a side of the rotary table such that a lower portion of the light beam collides with an upper end of a side surface of the rotary table and an upper portion of the light beam positioned more upward than the lower portion of the light beam passes a portion near the surface of the rotary table, and a light receiving part installed to face the light transmitting part and configured to receive the light beam passing the portion near the surface of the rotary table so as to detect an amount of received light.Type: GrantFiled: July 3, 2018Date of Patent: September 1, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Junnosuke Taguchi, Yuya Sasaki, Toshiya Chiba
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Publication number: 20200230701Abstract: A sealing structure with a surface of a base material with a through-hole, an underlying metal film, and a sealing member bonded to the underlying metal film to seal the through-hole. The sealing member includes a compressed product of a metal powder including gold having a purity of 99.9% by mass or more and a lid-like metal film including a bulk-like metal including gold and having a thickness of not less than 0.01 ?m and not more than 5 ?m. The sealing material includes an outer periphery-side densified region in contact with an underlying metal film and a center-side porous region in contact with the through-hole. The shape of pores in the densified region is specified, and the horizontal length (l) of a pore in the radial direction at any cross-section of the densified region and the width (W) of the densified region satisfy the relationship of l?0.1W.Type: ApplicationFiled: April 4, 2018Publication date: July 23, 2020Applicant: TANAKA KIKINZOKU KOGYO K.K.Inventors: Toshinori OGASHIWA, Yuya SASAKI, Masayuki MIYAIRI, Kenichi INOUE
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Patent number: 10640409Abstract: There is provided a method of manufacturing a glass container that can manufacture a glass container, which includes a bubble formed in a bottom portion and independent of the outside, with high yield by accurately controlling the position and size of the bubble.Type: GrantFiled: February 13, 2017Date of Patent: May 5, 2020Assignee: KOA GLASS CO., LTD.Inventors: Yuya Sasaki, Kenjirou Arai
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Patent number: 10615066Abstract: There is provided a substrate warping monitoring device for monitoring a warping of a substrate mounted in a substrate mounting region formed in a rotary table along a circumferential direction during rotation of the rotary table, including: an optical displacement meter located above the rotary table and configured to irradiate a light to a predetermined position on the rotary table, receive a reflected light reflected off the rotary table and the substrate which passes through the predetermined position and measure a surface profile of the substrate; a memory part configured to store a measurement value acquired when the light is irradiated on a predetermined reference surface, as a reference value; and a calculation part configured to calculate a warping amount of the substrate based on the surface profile of the substrate measured by the optical displacement meter and the reference value stored in the memory part.Type: GrantFiled: July 2, 2018Date of Patent: April 7, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Toshiya Chiba, Yuya Sasaki, Junnosuke Taguchi
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Patent number: 10549305Abstract: A support structure for a suspended injector includes a suspended injector having a tubular vertical portion extending in a vertical direction, one or more chamfered portions formed by chamfering an outer peripheral surface near an upper end of the tubular vertical portion, a pair of holding members each having a flat surface formed on an inner peripheral surface of each of the pair of holding members to engage with each of the chamfered portions, each of the pair of holding members holding the tubular vertical portion of the suspended injector by sandwiching the tubular vertical portion of the suspended injector from both sides each of the pair of holding members, and a support structure part configured to fixedly support the pair of holding members, and configured to suspend and support the suspended injector.Type: GrantFiled: August 24, 2017Date of Patent: February 4, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Yuya Sasaki, Kiichi Takahashi, Yasushi Takeuchi
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Publication number: 20190218129Abstract: There is provided a method of manufacturing a glass container that can manufacture a glass container, which includes a bubble formed in a bottom portion and independent of the outside, with high yield by accurately controlling the position and size of the bubble.Type: ApplicationFiled: February 13, 2017Publication date: July 18, 2019Inventors: Yuya SASAKI, Kenjirou ARAI
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Patent number: 10294565Abstract: A substrate processing apparatus includes a first hole portion formed through a sidewall of the process chamber and horizontally extending outward and a second hole portion formed to be contiguous with the first hole portion and defining a supply channel for a process gas. The apparatus also includes a gas nozzle, a plurality of seal members and an annular spacer. A proximal end of the gas nozzle is inserted into the first hole portion. The plurality of seal members is spaced apart from each other between an outer circumferential surface of the gas nozzle and the first hole portion. The annular spacer is inserted into the first hole portion and is pressed against an annular surface of an opening periphery of the second hole portion by the gas nozzle in a state where the proximal end of the gas nozzle is engaged with the annular spacer.Type: GrantFiled: October 18, 2016Date of Patent: May 21, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Kiichi Takahashi, Yuya Sasaki, Kosuke Takahashi
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Publication number: 20190013224Abstract: There is provided a substrate warping monitoring device for monitoring a warping of a substrate mounted in a substrate mounting region formed in a rotary table along a circumferential direction during rotation of the rotary table, including: an optical displacement meter located above the rotary table and configured to irradiate a light to a predetermined position on the rotary table, receive a reflected light reflected off the rotary table and the substrate which passes through the predetermined position and measure a surface profile of the substrate; a memory part configured to store a measurement value acquired when the light is irradiated on a predetermined reference surface, as a reference value; and a calculation part configured to calculate a warping amount of the substrate based on the surface profile of the substrate measured by the optical displacement meter and the reference value stored in the memory part.Type: ApplicationFiled: July 2, 2018Publication date: January 10, 2019Inventors: Toshiya CHIBA, Yuya SASAKI, Junnosuke TAGUCHI
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Publication number: 20190013225Abstract: A substrate warpage detection device for detecting warpage of a substrate loaded on a substrate loading region having a recess shape formed on a rotary table along a circumferential direction during rotation of the rotary table, includes a light transmitting part configured to transmit a light beam obliquely upward from a side of the rotary table such that a lower portion of the light beam collides with an upper end of a side surface of the rotary table and an upper portion of the light beam positioned more upward than the lower portion of the light beam passes a portion near the surface of the rotary table, and a light receiving part installed to face the light transmitting part and configured to receive the light beam passing the portion near the surface of the rotary table so as to detect an amount of received light.Type: ApplicationFiled: July 3, 2018Publication date: January 10, 2019Inventors: Junnosuke TAGUCHI, Yuya SASAKI, Toshiya CHIBA
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Patent number: 10125015Abstract: The present invention relates to a package production method includes the step of superposing a pair of substrates on each other, and bonding the substrates to each other to hermetically seal the inside of a sealing region surrounded by a sealing material, which is formed on any of the substrates. The sealing material is formed of a sintered body obtained by sintering a metal powder of at least one selected from gold, silver, palladium and platinum, the metal powder having a purity of 99.9% by weight or more and an average particle size of 0.005 ?m to 1.0 ?m, at least one core material having a width smaller than the width of the sealing material in a cross-sectional shape, and protruding from the periphery is formed on the substrate, and the core material compresses the sealing material to exhibit a sealing effect when the pair of substrates are bonded to each other. Accordingly, a sufficient sealing effect can be exhibited while a pressuring force to the substrate is reduced.Type: GrantFiled: August 18, 2015Date of Patent: November 13, 2018Assignee: TANAKA KIKINZOKU KOGYO K.K.Inventors: Toshinori Ogashiwa, Yuya Sasaki, Masayuki Miyairi
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Publication number: 20180056317Abstract: A support structure for a suspended injector includes a suspended injector having a tubular vertical portion extending in a vertical direction, one or more chamfered portions formed by chamfering an outer peripheral surface near an upper end of the tubular vertical portion, a pair of holding members each having a flat surface formed on an inner peripheral surface of each of the pair of holding members to engage with each of the chamfered portions, each of the pair of holding members holding the tubular vertical portion of the suspended injector by sandwiching the tubular vertical portion of the suspended injector from both sides each of the pair of holding members, and a support structure part configured to fixedly support the pair of holding members, and configured to suspend and support the suspended injector.Type: ApplicationFiled: August 24, 2017Publication date: March 1, 2018Inventors: Yuya SASAKI, Kiichi TAKAHASHI, Yasushi TAKEUCHI
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Publication number: 20180044175Abstract: The present invention relates to a package production method includes the step of superposing a pair of substrates on each other, and bonding the substrates to each other to hermetically seal the inside of a sealing region surrounded by a sealing material, which is formed on any of the substrates. The sealing material is formed of a sintered body obtained by sintering a metal powder of at least one selected from gold, silver, palladium and platinum, the metal powder having a purity of 99.9% by weight or more and an average particle size of 0.005 ?m to 1.0 ?m, at least one core material having a width smaller than the width of the sealing material in a cross-sectional shape, and protruding from the periphery is formed on the substrate, and the core material compresses the sealing material to exhibit a sealing effect when the pair of substrates are bonded to each other. Accordingly, a sufficient sealing effect can be exhibited while a pressuring force to the substrate is reduced.Type: ApplicationFiled: August 18, 2015Publication date: February 15, 2018Inventors: Toshinori OGASHIWA, Yuya SASAKI, Masayuki MIYAIRI
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Publication number: 20170356891Abstract: To measure the concentration of an oxidant in an oxidative cleaning liquid used in a process of cleaning an electronic material in a simple, easy, consistent, and accurate manner without being affected by impurities included in the cleaning liquid, such as metals. A method for measuring the concentration of an oxidant in a sample liquid used as a cleaning liquid in a process of cleaning an electronic material includes decomposing at least part of an oxidant included in the sample liquid by heating or the like; measuring the amount of oxygen gas generated by decomposition of the oxidant; and determining the concentration of the oxidant in the sample liquid on the basis of the amount of the oxygen gas.Type: ApplicationFiled: January 6, 2016Publication date: December 14, 2017Inventors: Hiroshi MORITA, Yuichi OGAWA, Yuya SASAKI