Patents by Inventor Yuyan Luo

Yuyan Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hybrid material post-CMP brushes and methods for forming the same
    Patent number: 11684144
    Abstract: Provided is disclosure for hybrid material post-CMP brushes and methods for forming the same. Embodiments of a hybrid material post-CMP brush may comprise at least two layers, where the hybrid brush is used to clean various surfaces, such as surfaces of semiconductor substrates. An example hybrid brush for cleaning a surface includes a mandrel, a molded first layer formed about the mandrel, where the molded first layer comprises a first material, and a molded second layer surrounding the molded first layer, where the molded second layer comprises a second material.
    Type: Grant
    Filed: June 2, 2020
    Date of Patent: June 27, 2023
    Assignee: Illinois Tool Works Inc.
    Inventors: Bradley Scott Withers, Yuyan Luo, Erik Scott Nelson, Brent Allan Best
  • HYBRID MATERIAL POST-CMP BRUSHES AND METHODS FOR FORMING THE SAME
    Publication number: 20200288857
    Abstract: Provided is disclosure for hybrid material post-CMP brushes and methods for forming the same. Embodiments of a hybrid material post-CMP brush may comprise at least two layers, where the hybrid brush is used to clean various surfaces, such as surfaces of semiconductor substrates. An example hybrid brush for cleaning a surface includes a mandrel, a molded first layer formed about the mandrel, where the molded first layer comprises a first material, and a molded second layer surrounding the molded first layer, where the molded second layer comprises a second material.
    Type: Application
    Filed: June 2, 2020
    Publication date: September 17, 2020
    Inventors: Bradley Scott Withers, Yuyan Luo, Erik Scott Nelson, Brent Allan Best
  • HYBRID MATERIAL POST-CMP BRUSHES AND METHODS FOR FORMING THE SAME
    Publication number: 20190090624
    Abstract: Provided is disclosure for hybrid material post-CMP brushes and methods for forming the same. Embodiments of a hybrid material post-CMP brush may comprise at least two layers, where the hybrid brush is used to clean various surfaces, such as surfaces of semiconductor substrates. An example hybrid brush for cleaning a surface includes a mandrel, a molded first layer formed about the mandrel, where the molded first layer comprises a first material, and a molded second layer surrounding the molded first layer, where the molded second layer comprises a second material.
    Type: Application
    Filed: September 22, 2017
    Publication date: March 28, 2019
    Inventors: Bradley Scott Withers, Yuyan Luo, Erik Scott Nelson, Brent Allan Best
  • Composite fuels for hydrogen generation
    Patent number: 8016899
    Abstract: Composite fuels for hydrogen generation include materials that endothermically release hydrogen, materials that exothermically release hydrogen, and additives to promote endothermic reaction and to inhibit exothermic reaction.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: September 13, 2011
    Assignee: Eion Energy Corporation
    Inventors: Qingjun Zhao, Yuyan Luo
  • Composite fuels for hydrogen generation
    Publication number: 20070194273
    Abstract: Composite fuels for hydrogen generation include materials that endothermically release hydrogen, materials that exothermically release hydrogen, and additives to promote endothermic reaction and to inhibit exothermic reaction.
    Type: Application
    Filed: February 20, 2007
    Publication date: August 23, 2007
    Inventors: Qingjun Zhao, Yuyan Luo