Patents by Inventor Yuzo Kayaoka

Yuzo Kayaoka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a capacitor having contact hole treated with hydrogen atoms and energy beam
    Patent number: 5527730
    Abstract: An insulating film is formed on the surface of the base of a semiconductor, and a portion of the insulating film is removed to cause the surface to appear outside. The exposed surface is terminated with hydrogen, and then energy beams are applied to selectively remove the terminating hydrogen. Metal is selectively deposited on the portion terminated with left hydrogen atoms.
    Type: Grant
    Filed: April 19, 1995
    Date of Patent: June 18, 1996
    Assignee: Conon Kabushiki Kaisha
    Inventors: Yuzo Kayaoka, Tetsuo Asaba, Kenji Makino, Hiroshi Yuzurihara, Kei Fujita, Seiji Kamei, Yutaka Akino, Yutaka Yuge, Mineo Shimotsusa, Hideshi Kuwabara