Patents by Inventor Yuzuru TADOKORO
Yuzuru TADOKORO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPARATUS, AND EUV EXPOSURE APPARATUS
Publication number: 20240128705Abstract: A gas laser amplifier includes a housing, discharge electrode pairs, and an optical resonator. The housing includes an entrance window that allows entry of a first laser beam from outside and an exit window that allows exit of the first laser beam amplified. Each of the discharge electrode pairs excites a laser gas supplied between discharge electrodes facing each other in the housing. The optical resonator causes a second laser beam to oscillate with a gain of the excited laser gas in a non-incident state where the first laser beam from outside the housing does not enter the housing through the entrance window. In an incident state where the first laser beam enters the housing through the entrance window, the optical resonator suspends the oscillation of the second laser beam.Type: ApplicationFiled: November 11, 2019Publication date: April 18, 2024Applicant: Mitsubishi Electric CorporationInventors: Tatsuya YAMAMOTO, Junichi NISHIMAE, Yuzuru TADOKORO, Masashi NARUSE, Takuya KAWASHIMA -
Patent number: 11958128Abstract: A laser apparatus includes a laser oscillator; an acousto-optic modulation unit including a first acousto-optic modulator that diffracts a laser beam from the laser oscillator when a first ultrasonic wave is applied and a second acousto-optic modulator that diffracts a higher order beam output from the first acousto-optic modulator when a second ultrasonic wave is applied; and an amplifier that amplifies the laser beam from the acousto-optic modulation unit, a propagation direction of the first ultrasonic wave relative to a diffracted direction of the higher order beam emitted from the first acousto-optic modulator and a propagation direction of the second ultrasonic wave relative to a diffracted direction of a higher order beam emitted from the second acousto-optic modulator being different.Type: GrantFiled: June 30, 2021Date of Patent: April 16, 2024Assignee: MITSUBISHI ELECTRIC CORPORATIONInventors: Koji Funaoka, Tatsuya Yamamoto, Yuzuru Tadokoro, Masayuki Saiki, Hiromasa Mihara, Yoshiharu Kurosaki
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Publication number: 20230271273Abstract: A laser apparatus includes a laser oscillator; an acousto-optic modulation unit including a first acousto-optic modulator that diffracts a laser beam from the laser oscillator when a first ultrasonic wave is applied and a second acousto-optic modulator that diffracts a higher order beam output from the first acousto-optic modulator when a second ultrasonic wave is applied; and an amplifier that amplifies the laser beam from the acousto-optic modulation unit, a propagation direction of the first ultrasonic wave relative to a diffracted direction of the higher order beam emitted from the first acousto-optic modulator and a propagation direction of the second ultrasonic wave relative to a diffracted direction of a higher order beam emitted from the second acousto-optic modulator being different.Type: ApplicationFiled: June 30, 2021Publication date: August 31, 2023Applicant: Mitsubishi Electric CorporationInventors: Koji FUNAOKA, Tatsuya YAMAMOTO, Yuzuru TADOKORO, Masayuki SAIKI, Hiromasa MIHARA, Yoshiharu KUROSAKI
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Publication number: 20230051665Abstract: A laser amplification device includes a laser oscillator that includes a first laser active medium including a mixed gas containing carbon dioxide gas and emits pulsed laser light with the full width at half maximum of between 15 ns to 200 ns, and a laser amplifier that includes a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with the full width at half maximum of between 5 ns and 30 ns to be output.Type: ApplicationFiled: March 16, 2020Publication date: February 16, 2023Applicant: Mitsubishi Electric CorporationInventors: Yuzuru TADOKORO, Tatsuya YAMAMOTO, Junichi NISHIMAE
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Patent number: 11367988Abstract: A gas laser device includes a shielding plate that is a first shielding member, and a shielding plate that is a second shielding member. The first shielding member includes a first opening, and a second opening. A laser beam that is to be propagated to discharge regions passes through the first opening. The laser beam that has taken a round trip through the discharge regions after passing through the first opening passes through the second opening. The second shielding plate faces the first shielding member the discharge regions located therebetween. The shielding plate includes an opening that is a third opening. The laser beam that has been propagated through the first opening and the discharge regions, and the laser beam that is to be propagated to the second opening through the discharge regions pass through the third opening. A plane shape of the third opening includes a rectilinear segment.Type: GrantFiled: May 17, 2019Date of Patent: June 21, 2022Assignee: MITSUBISHI ELECTRIC CORPORATIONInventors: Tatsuya Yamamoto, Junichi Nishimae, Yuzuru Tadokoro, Masashi Naruse, Takuya Kawashima
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Publication number: 20220094129Abstract: A gas laser device includes a shielding plate that is a first shielding member, and a shielding plate that is a second shielding member. The first shielding member includes a first opening, and a second opening. A laser beam that is to be propagated to discharge regions passes through the first opening. The laser beam that has taken a round trip through the discharge regions after passing through the first opening passes through the second opening. The second shielding plate faces the first shielding member the discharge regions located therebetween. The shielding plate includes an opening that is a third opening. The laser beam that has been propagated through the first opening and the discharge regions, and the laser beam that is to be propagated to the second opening through the discharge regions pass through the third opening. A plane shape of the third opening includes a rectilinear segment.Type: ApplicationFiled: May 17, 2019Publication date: March 24, 2022Applicant: Mitsubishi Electric CorporationInventors: Tatsuya YAMAMOTO, Junichi NISHIMAE, Yuzuru TADOKORO, Masashi NARUSE, Takuya KAWASHIMA
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Publication number: 20210391683Abstract: A laser device includes: a first mirror and a second mirror that cause resonance of a plurality of beams having different wavelengths from one another; a diffraction grating that causes the beams that are incident from the first mirror with directions of beam central axes being different from one another to travel to the second mirror while aligning the beam central axes with one another, and causes the beams that are incident from the second mirror with the beam central axes being aligned with one another to travel to the first mirror while causing the directions of the beam central axes to be different from one another; and a housing unit housing a laser medium that is a medium through which the beams traveling between the first mirror and the diffraction grating pass, and has a discrete gain spectrum in which a peak occurs at each wavelength of the beams.Type: ApplicationFiled: October 10, 2018Publication date: December 16, 2021Applicant: Mitsubishi Electric CorporationInventors: Yuzuru TADOKORO, Junichi NISHIMAE, Tatsuya YAMAMOTO