Patents by Inventor Yvonne Jänicke

Yvonne Jänicke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Insitu tool health and recipe quality monitoring on a CDSEM
    Patent number: 10185312
    Abstract: Systems, methods, and computer program products for monitoring the tool health of on a critical dimension scanning electron microscope (CDSEM) and recipe quality on a CDSEM. Run-time data from a critical dimension scanning electron microscope is received at a computer. The computer converts the run-time data to time-sequenced data, and analyzes the time-sequenced data to detect an operational abnormality associated with the CDSEM.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: January 22, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Alexander Ullrich, Martin Pilz
  • INSITU TOOL HEALTH AND RECIPE QUALITY MONITORING ON A CDSEM
    Publication number: 20180217584
    Abstract: Systems, methods, and computer program products for monitoring the tool health of on a critical dimension scanning electron microscope (CDSEM) and recipe quality on a CDSEM. Run-time data from a critical dimension scanning electron microscope is received at a computer. The computer converts the run-time data to time-sequenced data, and analyzes the time-sequenced data to detect an operational abnormality associated with the CDSEM.
    Type: Application
    Filed: January 31, 2017
    Publication date: August 2, 2018
    Inventors: Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Alexander Ullrich, Martin Pilz