Patents by Inventor Zach Prather

Zach Prather has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lid liner for chemical vapor deposition chamber
    Patent number: 6911093
    Abstract: A lid liner for a chemical vapor deposition chamber includes an annular portion having an inner surface for surrounding a reaction volume within the chemical deposition chamber; a mounting tab formed on an outer surface of the annular portion; and a hole formed in the mounting tab for receiving a fastener wherein the hole does not penetrate the inner surface of the annular portion.
    Type: Grant
    Filed: June 2, 2003
    Date of Patent: June 28, 2005
    Assignee: LSI Logic Corporation
    Inventors: David Stacey, Zach Prather, Jonathan Allinger