Patents by Inventor Zachary B. Katz

Zachary B. Katz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor constructions
    Patent number: 7554171
    Abstract: The invention includes a method of forming a planarized surface over a semiconductor substrate. A substrate is provided which includes a memory array region and a peripheral region proximate the memory array region. The memory array region has a higher average elevational height than the peripheral region. Polysilazane is formed over the memory array region and over the peripheral region. The polysilazane is densified. A material is formed over the polysilazane. The material is planarized while using the densified polysilazane as a stop. The planarization forms a planarized surface which extends over the memory array and peripheral regions. The planarized surface comprises both the densified polysilazane and the material.
    Type: Grant
    Filed: January 14, 2008
    Date of Patent: June 30, 2009
    Assignee: Micron Technology, Inc.
    Inventor: Zachary B. Katz
  • Semiconductor Constructions
    Publication number: 20080128870
    Abstract: The invention includes a method of forming a planarized surface over a semiconductor substrate. A substrate is provided which includes a memory array region and a peripheral region proximate the memory array region. The memory array region has a higher average elevational height than the peripheral region. Polysilazane is formed over the memory array region and over the peripheral region. The polysilazane is densified. A material is formed over the polysilazane. The material is planarized while using the densified polysilazane as a stop. The planarization forms a planarized surface which extends over the memory array and peripheral regions. The planarized surface comprises both the densified polysilazane and the material.
    Type: Application
    Filed: January 14, 2008
    Publication date: June 5, 2008
    Inventor: Zachary B. Katz
  • Semiconductor constructions
    Patent number: 7345332
    Abstract: The invention includes a method of forming a planarized surface over a semiconductor substrate. A substrate is provided which includes a memory array region and a peripheral region proximate the memory array region. The memory array region has a higher average elevational height than the peripheral region. Polysilazane is formed over the memory array region and over the peripheral region. The polysilazane is densified. A material is formed over the polysilazane. The material is planarized while using the densified polysilazane as a stop. The planarization forms a planarized surface which extends over the memory array and peripheral regions. The planarized surface comprises both the densified polysilazane and the material.
    Type: Grant
    Filed: March 24, 2006
    Date of Patent: March 18, 2008
    Assignee: Micron Technology, Inc.
    Inventor: Zachary B. Katz
  • Methods of forming planarized surfaces over semiconductor substrates
    Patent number: 7037840
    Abstract: The invention includes a method of forming a planarized surface over a semiconductor substrate. A substrate is provided which includes a memory array region and a peripheral region proximate the memory array region. The memory array region has a higher average elevational height than the peripheral region. Polysilazane is formed over the memory array region and over the peripheral region. The polysilazane is densified. A material is formed over the polysilazane. The material is planarized while using the densified polysilazane as a stop. The planarization forms a planarized surface which extends over the memory array and peripheral regions. The planarized surface comprises both the densified polysilazane and the material.
    Type: Grant
    Filed: January 26, 2004
    Date of Patent: May 2, 2006
    Assignee: Micron Technology, Inc.
    Inventor: Zachary B. Katz