Patents by Inventor Zachary Henkel

Zachary Henkel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automated, modular approach to assigning semiconductor lots to tools
    Publication number: 20070233301
    Abstract: The operation of a semiconductor fabrication facility may be automated to enable efficient assignments of lots to specific process tools or entities. This may involve the use of an algorithm which may have aspects which are common across various process areas within the fabrication facility. However, the algorithm may be customized to meet the needs of specific process areas.
    Type: Application
    Filed: March 31, 2006
    Publication date: October 4, 2007
    Inventors: Murali Krishna, Yi Deng, Aishwarya Varadhan, Joseph Concelman, Zachary Henkel, Robert Madson